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US07385209B2 Micromachining process, system and product 有权
微机加工,系统和产品

Micromachining process, system and product
Abstract:
Ion beam lithography technique wherein a higher amount of radiation energy is deposited to predetermined regions in the bulk if a suitable substrate. By selecting the radiation nature, its energy and the irradiation parameters a structure can be created in the bulk of the material leaving the surface essentially untouched.
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