Invention Grant
- Patent Title: Method and system for supplying high purity fluid
- Patent Title (中): 供应高纯度流体的方法和系统
-
Application No.: US11082482Application Date: 2005-03-17
-
Publication No.: US07387663B2Publication Date: 2008-06-17
- Inventor: Tadaharu Watanabe , Robert Torres, Jr. , Joseph Vininski
- Applicant: Tadaharu Watanabe , Robert Torres, Jr. , Joseph Vininski
- Applicant Address: US NJ Parsippany
- Assignee: Matheson Tri-Gas, Inc.
- Current Assignee: Matheson Tri-Gas, Inc.
- Current Assignee Address: US NJ Parsippany
- Agency: Townsend and Townsend and Crew LLP
- Main IPC: B01D53/04
- IPC: B01D53/04

Abstract:
A fluid purifying apparatus that includes a manifold that includes a first branch and a second branch, a first check valve coupled to the first branch of the manifold, and a purifier unit that includes a first end and a second end, wherein the first end is coupled to the second branch of the manifold. Also, a fluid purifying apparatus that includes a vessel that includes a first interior compartment for containing a purifier material and a second interior compartment for containment of a fluid containing impurities, wherein the first interior compartment is separated from the second interior compartment by a fluid permeable support, and a rupturable seal.
Public/Granted literature
- US20050160910A1 Method and system for supplying high purity fluid Public/Granted day:2005-07-28
Information query
IPC分类: