Invention Grant
- Patent Title: Capacitor in semiconductor device and method of manufacturing the same
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Application No.: US11271601Application Date: 2005-11-10
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Publication No.: US07387929B2Publication Date: 2008-06-17
- Inventor: Eun A. Lee , Hai Won Kim
- Applicant: Eun A. Lee , Hai Won Kim
- Applicant Address: KR Gyunggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyunggi-do
- Agency: Marshall, Gerstein & Borun LLP
- Priority: KR10-2005-0058768 20050630
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
The present invention relates to a capacitor in semiconductor device and a method of manufacturing the same, wherein, owing to formation of a lower electrode and an upper electrode into a stack structure of a poly-silicon layer and an aluminum (Al) layer and formation of an alumina (Al2O3) film as a dielectric film, the lower electrode is formed into a stack structure of the poly-silicon layer-aluminum (Al) layer, thus increasing a surface area of electrodes due to the absence of oxidation during annealing, and preventing degeneration of the device, and use of the dielectric film including a high-dielectric constant material layer enables reduction of the dielectric film's thickness. Accordingly, the present invention is capable of increasing capacitance, is capable of reducing leakage current and improving dielectric breakdown characteristics via internal formation of an MIM capacitor, and is capable of reducing production costs by performing a continuous process via use of a single piece of equipment.
Public/Granted literature
- US20070004164A1 Capacitor in semiconductor device and method of manufacturing the same Public/Granted day:2007-01-04
Information query
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