发明授权
- 专利标题: Stage apparatus, plane motor, and device manufacturing method
- 专利标题(中): 舞台装置,平面电动机和装置制造方法
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申请号: US11126365申请日: 2005-05-11
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公开(公告)号: US07388307B2公开(公告)日: 2008-06-17
- 发明人: Keiji Emoto
- 申请人: Keiji Emoto
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2004-146641 20040517
- 主分类号: H02K41/00
- IPC分类号: H02K41/00
摘要:
A stage apparatus includes a movable element including a plurality of magnets, a stage fixed to the movable element, and a stator configured with layers of coils arranged opposite to the magnets with a gap, in which (i) respective layers of coils serve as a plurality of driving axes for driving the movable element in two-dimensional directions, (ii) the stage apparatus generates a driving force in the movable stage by applying power to coils corresponding to respective layers, (iii) a conductive area of a section having a normal coil in a coil winding direction is made so that heat generation amounts of coils corresponding to the respective layers are substantially equal, and (iv) the conductive area of the section having a normal in the coil winding direction in the respective layers of coils is made relatively larger than coils having a smaller driving force constant.
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