Invention Grant
- Patent Title: Light amount measurement device and light amount measurement method
- Patent Title (中): 光量测量装置和光量测量方法
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Application No.: US11344205Application Date: 2006-02-01
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Publication No.: US07388660B2Publication Date: 2008-06-17
- Inventor: Noboru Kobayashi , Riki Ogawa , Masayuki Hideshima , Hiroyuki Nagahama , Koji Nakajima
- Applicant: Noboru Kobayashi , Riki Ogawa , Masayuki Hideshima , Hiroyuki Nagahama , Koji Nakajima
- Applicant Address: JP Kawasaki JP Tokyo
- Assignee: Advanced Mask Inspection Technology Inc.,Kabushiki Kaisha Topcon
- Current Assignee: Advanced Mask Inspection Technology Inc.,Kabushiki Kaisha Topcon
- Current Assignee Address: JP Kawasaki JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2005-297242 20051012
- Main IPC: G01J1/00
- IPC: G01J1/00
Abstract:
A device for measuring the intensity of incoming light is disclosed. This device includes a rotatable light blocking unit which interrupts incident signal light at short regular intervals. The device also includes a light source which emits certain light different from the signal light while the signal light is interrupted by the block unit, and a measurement unit for measuring intensity values of the signal light and the certain light. A correction unit is provided for correcting the measured signal light intensity based on the certain light intensity. A calculator unit calculates a correction value through comparison of the intensity of the certain light to a reference value. The correction unit uses this correction value to correct the signal light intensity.
Public/Granted literature
- US20070081149A1 Light amount measurement device and light amount measurement method Public/Granted day:2007-04-12
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