发明授权
- 专利标题: Surface acoustic wave device manufacturing method, surface acoustic wave device, and communications equipment
- 专利标题(中): 表面声波器件制造方法,表面声波器件和通讯设备
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申请号: US11169141申请日: 2005-06-27
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公开(公告)号: US07389570B2公开(公告)日: 2008-06-24
- 发明人: Yuuko Yokota , Motoki Ito , Kiyohiro Iioka , Wataru Koga , Shigehiko Nagamine
- 申请人: Yuuko Yokota , Motoki Ito , Kiyohiro Iioka , Wataru Koga , Shigehiko Nagamine
- 申请人地址: JP Kyoto
- 专利权人: Kyocera Corporation
- 当前专利权人: Kyocera Corporation
- 当前专利权人地址: JP Kyoto
- 代理机构: Hogan & Hartson LLP
- 优先权: JP2004-190564 20040628; JP2004-268257 20040915
- 主分类号: H03H3/08
- IPC分类号: H03H3/08
摘要:
After electrode patterning on an electrode forming surface of a piezoelectric substrate 2 (FIG. 1(b)), a conductor layer is formed on an electrode non-forming surface of the piezoelectric substrate 2 (FIG. 1(c)). After forming the conductor layer, the conductor layer formed on the other surface is removed (FIG. 1(f)) after at least one step (FIG. 1(e)), and thereafter, dicing for separation into elements and mounting on a mounting substrate are carried out. By removing all the conductor layer on the other surface of the piezoelectric substrate, the out-of-passband attenuation and isolation performance can be significantly improved.
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