Invention Grant
- Patent Title: Fabrication method of multi-wavelength semiconductor laser device
- Patent Title (中): 多波长半导体激光器件的制作方法
-
Application No.: US11247935Application Date: 2005-10-11
-
Publication No.: US07393710B2Publication Date: 2008-07-01
- Inventor: Jin Chul Kim , Su Yeol Lee , Chang Zoo Kim , Sang Heon Han , Keun Man Song , Tae Jun Kim , Seok Beom Choi
- Applicant: Jin Chul Kim , Su Yeol Lee , Chang Zoo Kim , Sang Heon Han , Keun Man Song , Tae Jun Kim , Seok Beom Choi
- Applicant Address: KR Suwon, Kyungki-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd
- Current Assignee: Samsung Electro-Mechanics Co., Ltd
- Current Assignee Address: KR Suwon, Kyungki-Do
- Agency: Volpe and Koenig P.C.
- Priority: KR10-2004-0085774 20041026; KR10-2004-0087213 20041029
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The present invention relates to a two-wavelength semiconductor laser device, more particularly, to a fabrication method of a multi-wavelength semiconductor laser device. In this method, a substrate having an upper surface separated into at least first and second areas is provided. Then, a first dielectric mask on the substrate is formed to expose only the first area. Then, epitaxial layers for a first semiconductor laser are grown on the first area of the substrate. Then, a second dielectric mask on the substrate is formed to expose only the second area. Then, epitaxial layers for a second semiconductor laser are grown on the second area of the substrate.
Public/Granted literature
- US20060088950A1 Fabrication method of multi-wavelength semiconductor laser device Public/Granted day:2006-04-27
Information query
IPC分类: