Invention Grant
- Patent Title: Method of measuring a surface voltage of an insulating layer
- Patent Title (中): 测量绝缘层的表面电压的方法
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Application No.: US11461312Application Date: 2006-07-31
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Publication No.: US07394279B2Publication Date: 2008-07-01
- Inventor: Mi-Sung Lee , Yu-Sin Yang , Chung-Sam Jun , Byung-Sug Lee
- Applicant: Mi-Sung Lee , Yu-Sin Yang , Chung-Sam Jun , Byung-Sug Lee
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Marger Johnson & McCollom, P.C.
- Priority: KR10-2005-0069954 20050730
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R19/00 ; G01R31/08
Abstract:
In a method of measuring a surface voltage of an insulating layer, the number of times that surface voltages are measured in a depletion region increases so that precise data about the depletion region may be obtained. The number of times that the surface voltages are measured in an accumulation region and an inversion region decreases so that the data about the depletion region may be rapidly obtained.
Public/Granted literature
- US20070023834A1 METHOD OF MEASURING A SURFACE VOLTAGE OF AN INSULATING LAYER Public/Granted day:2007-02-01
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