发明授权
US07396636B2 Segmented resist islands for photolithography on single sliders 失效
在单个滑块上用于光刻的分段抗蚀岛

Segmented resist islands for photolithography on single sliders
摘要:
A method for creating segmented resist islands for photolithography on single sliders is disclosed. The method includes ramping the temperature of a number of single sliders, to a temperature that is below a proper softbake temperature. The single sliders reside in a divider and the single sliders and walls of the divider have a layer of resist deposited on them. Coarse lithography is then performed to remove the resist from above portions of the walls of the divider; and the temperature of the single sliders, the resist and the divider is then ramped to a proper softbake temperature.
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