Invention Grant
US07396706B2 Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks
有权
用于形成具有不同波长峰值的基本稳定的激光输出脉冲分布的同步技术
- Patent Title: Synchronization technique for forming a substantially stable laser output pulse profile having different wavelength peaks
- Patent Title (中): 用于形成具有不同波长峰值的基本稳定的激光输出脉冲分布的同步技术
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Application No.: US11067299Application Date: 2005-02-25
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Publication No.: US07396706B2Publication Date: 2008-07-08
- Inventor: Yunlong Sun , Richard Harris , William J. Jordens , Lei Sun
- Applicant: Yunlong Sun , Richard Harris , William J. Jordens , Lei Sun
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Stoel Rives LLP
- Main IPC: B23K26/36
- IPC: B23K26/36 ; H01L35/34 ; H01L21/30
Abstract:
A specially shaped laser pulse energy profile characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.
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