发明授权
- 专利标题： Method and apparatus for specimen fabrication
- 专利标题（中）： 用于样品制造的方法和装置
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申请号： US11701414申请日： 2007-02-02
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公开(公告)号： US07397051B2公开(公告)日： 2008-07-08
- 发明人: Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
- 申请人： Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Antonelli, Terry, Stout & Kraus, LLP.
- 优先权： JP9-196213 19970722; JP9-263184 19970929; JP9-263185 19970929
- 主分类号： H01J37/20
- IPC分类号： H01J37/20
摘要：
A specimen fabrication apparatus including: a vacuum chamber that accommodates a sample stage to mount a sample, an irradiating optical system that irradiates a focused ion beam to the sample to form a specimen, and a specimen holder placed in the vacuum chamber, to which said formed specimen is transferred by transferring means while the specimen chamber remains substantially sealed.
公开/授权文献
- US20070145301A1 Method and apparatus for specimen fabrication 公开/授权日：2007-06-28