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US07397551B2 Method for verifying scan precision of a laser measurement machine 失效
验证激光测量机扫描精度的方法

Method for verifying scan precision of a laser measurement machine
Abstract:
A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a standardized BGA model; measuring Z coordinates values of each solder ball peak of the BGA model for certain times; determining a Z coordinates conventional true value of each solder ball peak; measuring X, Y coordinates values of each solder ball centre of the BGA model; determining a coplanarity conventional true value of a seating-plane; determining an optimum scanning mode; determining optimum scanning parameters under the optimum scanning mode; scanning the BGA model under the optimum scanning parameters and the optimum scanning mode; obtaining X, Y, Z coordinates values of each solder ball peak; evaluating the veracity of Z coordinates of each solder ball peak; evaluating the veracity and repetitiveness of coplanarity; and evaluating scan precision of the laser measurement machine.
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