发明授权
- 专利标题： Piezoelectric element, ink jet recording head and producing method for piezoelectric element
- 专利标题（中）： 压电元件，喷墨记录头和压电元件的制造方法
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申请号： US10928277申请日： 2004-08-30
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公开(公告)号： US07399066B2公开(公告)日： 2008-07-15
- 发明人: Makoto Kubota , Motokazu Kobayashi , Shinji Eritate , Hisao Suzuki , Fumio Uchida , Chiemi Shimizu , Kenji Maeda
- 申请人： Makoto Kubota , Motokazu Kobayashi , Shinji Eritate , Hisao Suzuki , Fumio Uchida , Chiemi Shimizu , Kenji Maeda
- 申请人地址： JP Tokyo JP Osaka
- 专利权人： Canon Kabushiki Kaisha,Fuji Chemical Co. Ltd
- 当前专利权人： Canon Kabushiki Kaisha,Fuji Chemical Co. Ltd
- 当前专利权人地址： JP Tokyo JP Osaka
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2003-311305 20030903
- 主分类号： B41J2/045
- IPC分类号： B41J2/045 ; H01L41/00
摘要：
A piezoelectric element including a vibrating plate, a lower electrode, a piezoelectric film and an upper electrode laminated in this order, wherein the lower electrode, the upper electrode and the piezoelectric film are formed by a perovskite type oxide while the vibrating plate is formed by a metal oxide, and a junction interface is substantially absent between the vibrating plate and the lower electrode, between the lower electrode and the piezoelectric film and between the piezoelectric film and the upper electrode.