发明授权
- 专利标题: Floating trap non-volatile semiconductor memory devices including high dielectric constant blocking insulating layers
- 专利标题(中): 浮置阱非易失性半导体存储器件包括高介电常数阻挡绝缘层
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申请号: US11043485申请日: 2005-01-26
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公开(公告)号: US07400009B2公开(公告)日: 2008-07-15
- 发明人: Chang-Hyun Lee , Jung-Dal Choi , Byoung-Woo Ye
- 申请人: Chang-Hyun Lee , Jung-Dal Choi , Byoung-Woo Ye
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR2001-0037421 20010628; KR2002-0005622 20020131
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Floating trap non-volatile memory devices and methods are provided. The memory devices include a semiconductor substrate and an adjacent gate electrode. Between the substrate and the gate electrode may be a tunneling insulating layer having a first dielectric constant, a blocking insulating layer having a second dielectric constant that is greater than the first dielectric constant, and a charge storage layer.
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