发明授权
- 专利标题： Thin film resistor structure and method of fabricating a thin film resistor structure
- 专利标题（中）： 薄膜电阻器结构及薄膜电阻器结构的制造方法
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申请号： US11242575申请日： 2005-10-04
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公开(公告)号： US07403095B2公开(公告)日： 2008-07-22
- 发明人: Brian Vialpando , Eric William Beach , Philipp Steinmann
- 申请人： Brian Vialpando , Eric William Beach , Philipp Steinmann
- 申请人地址： US TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： US TX Dallas
- 代理商 Wade J. Brady, III; Frederick J. Telecky, Jr.
- 主分类号： H01C1/012
- IPC分类号： H01C1/012
摘要：
A thin film resistor structure and a method of fabricating a thin film resistor structure is provided. The thin film resistor structure includes an electrical interface layer or head layer that is a combination of a Titanium (Ti) layer and a Titanium Nitride (TiN) layer. The combination of the Ti layer and the TiN layer mitigates resistance associated with the electrical interface layers.
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