Invention Grant
- Patent Title: Method for making a pressure sensor
- Patent Title (中): 制造压力传感器的方法
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Application No.: US11139207Application Date: 2005-05-27
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Publication No.: US07404247B2Publication Date: 2008-07-29
- Inventor: Odd Harald Steen Eriksen , Shuwen Guo
- Applicant: Odd Harald Steen Eriksen , Shuwen Guo
- Applicant Address: US MN Burnsville
- Assignee: Rosemount Aerospace Inc.
- Current Assignee: Rosemount Aerospace Inc.
- Current Assignee Address: US MN Burnsville
- Agency: Thompson Hine LLP
- Main IPC: G01R3/00
- IPC: G01R3/00

Abstract:
A method for making a pressure sensor including the steps of providing a substrate and forming or locating a pressure sensing component on the substrate. The method further includes the step of, after the forming or locating step, etching a cavity in the substrate below the pressure sensing component to define a diaphragm above the cavity with the pressure sensing component located on the diaphragm. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the diaphragm.
Public/Granted literature
- US20060076855A1 Method for making a pressure sensor Public/Granted day:2006-04-13
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