发明授权
- 专利标题： Method of manufacturing article having uneven surface
- 专利标题（中）： 制造具有不平坦表面的制品的方法
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申请号： US10993587申请日： 2004-11-19
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公开(公告)号： US07407889B2公开(公告)日： 2008-08-05
- 发明人: Keiji Tsunetomo , Shinya Okamoto , Yasuhiro Saito , Junji Kurachi , Akihiro Koyama , Hirotaka Koyo , Takeshi Hidaka , Hiroaki Kasai , Masamichi Hijino , Yasushi Nakamura
- 申请人： Keiji Tsunetomo , Shinya Okamoto , Yasuhiro Saito , Junji Kurachi , Akihiro Koyama , Hirotaka Koyo , Takeshi Hidaka , Hiroaki Kasai , Masamichi Hijino , Yasushi Nakamura
- 申请人地址： JP Tokyo JP Tokyo
- 专利权人： Nippon Sheet Glass Company, Limited,Olympus Corporation
- 当前专利权人： Nippon Sheet Glass Company, Limited,Olympus Corporation
- 当前专利权人地址： JP Tokyo JP Tokyo
- 代理机构： Hamre, Schumann, Mueller & Larson, P.C.
- 优先权： JP2003-056171 20030303
- 主分类号： H01L21/311
- IPC分类号： H01L21/311
摘要：
The present invention improves a method of forming a surface unevenness using a difference in etching rates, and relaxes limitations on substrates in this method. In a method of the present invention, an uneven surface is formed by a method including applying pressure to a predetermined region in a surface of a thin film formed on a substrate, and etching a region including at least a portion of the predetermined region and at least a portion of the reminder of the surface that excludes the predetermined region. An etching rate difference within the thin film increases freedom in selecting a substrate material.
公开/授权文献
- US20050098539A1 Method of manufacturing article having uneven surface 公开/授权日：2005-05-12
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