发明授权
- 专利标题: Image sensing apparatus and method using radiation
- 专利标题(中): 使用辐射的图像感测装置和方法
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申请号: US11428839申请日: 2006-07-06
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公开(公告)号: US07408169B2公开(公告)日: 2008-08-05
- 发明人: Takamasa Ishii , Minoru Watanabe
- 申请人: Takamasa Ishii , Minoru Watanabe
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Morgan & Finnegan, LLP
- 优先权: JP2002-247249 20020827; JP2003-017806 20030127
- 主分类号: G01T1/24
- IPC分类号: G01T1/24 ; H01L25/00
摘要:
This invention is to provide a radiation image sensing apparatus capable of automatically adjusting an incident radiation dose without requiring high-speed driving while suppressing any attenuation of the radiation before detection, and a method of manufacturing the same. To accomplish this, a read TFT (1) is formed on an insulating substrate (11). The semiconductor layer (19) and n+-semiconductor layer (20) of an MIS photoelectric conversion element (2) are formed on a second insulating layer (18) that covers the read TFT (1) to be aligned with source and drain electrodes (16) functioning as lower electrodes. The semiconductor layer (21) of a TFT sensor (3) is formed to be aligned with a gate electrode (17) when viewed from the upper side. The semiconductor layers (19, 21) are formed from the same layer. The upper electrode (22) of the MIS photoelectric conversion element (2) is formed on the n+-semiconductor layer (20). Two ohmic contact layers (23) are formed on the semiconductor layer (21). Source and drain electrodes (24) are formed on the two ohmic contact layers (23), respectively.
公开/授权文献
- US20060237656A1 IMAGE SENSING APPARATUS AND METHOD USING RADIATION 公开/授权日:2006-10-26
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