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公开(公告)号：US08680472B2
公开(公告)日：2014-03-25
申请号：US12596493
申请日：2008-07-18
IPC分类号： H01L27/146 , G01T1/20
CPC分类号： H04N5/361 , G01T1/2928 , H01L27/14603 , H01L27/14609 , H01L27/14636 , H01L27/14658 , H01L27/14663 , H01L27/14692 , H04N5/32 , H04N5/357 , H04N5/3655 , H04N5/3658 , H04N5/3696 , H04N5/37457 , H04N5/378
摘要： A radiation detecting apparatus capable of obtaining good images including decreased noise includes a plurality of pixels, each having a photoelectric conversion element for converting incident radiation into an electric signal and a first switch element, connected to the photoelectric conversion element, and a second switch element, not connected to the conversion element. A first signal line, a second signal line and a drive line are provided, where the first switch element has a first main electrode connected electrically to the first signal line, a second main electrode connected electrically to the photoelectric conversion element, and a gate electrode connected electrically to the drive line, and the second switch element has a first main electrode connected to the second signal line and a gate electrode connected electrically to the drive wiring common to the first switch element, and a differential means for outputting a signal corresponding to a difference between outputs from the first and second switch elements.
摘要翻译： 能够获得包括降低噪声的良好图像的放射线检测装置包括多个像素，每个像素具有用于将入射辐射转换成电信号的光电转换元件和连接到光电转换元件的第一开关元件，以及第二开关元件 ，未连接到转换元素。 提供第一信号线，第二信号线和驱动线，其中第一开关元件具有与第一信号线电连接的第一主电极，与光电转换元件电连接的第二主电极和栅电极 与驱动线电连接，第二开关元件具有连接到第二信号线的第一主电极和与第一开关元件共用的驱动配线电连接的栅电极，以及用于输出对应于 来自第一和第二开关元件的输出之间的差异。
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公开(公告)号：US20120080605A1
公开(公告)日：2012-04-05
申请号：US13231167
申请日：2011-09-13
申请人： Jun Kawanabe , Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Kentaro Fujiyoshi , Hiroshi Wayama
发明人： Jun Kawanabe , Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Kentaro Fujiyoshi , Hiroshi Wayama
IPC分类号： G01T1/24
CPC分类号： G01T1/243
摘要： A stacked-type detection apparatus includes a plurality of pixels arranged at small intervals in row and column directions and has small signal line capacitance that allows a high-speed driving operation. Each pixel includes a conversion element configured to convert radiation or light into an electric charge and a switch element disposed on an insulating substrate. A driving line is disposed on the insulating substrate and is connected to switch elements arranged in the row direction; and a signal line is connected to switch elements arranged in the column direction. Each conversion element is disposed above a corresponding switch element. The driving line is realized using a conductive layer embedded in an insulating layer located below an uppermost surface portion of the driving line located below an uppermost surface portion of a main electrode of the switch element located below the conversion element.
摘要翻译： 层叠型检测装置包括以行和列方向以小间隔排列的多个像素，并且具有允许高速驱动操作的小信号线电容。 每个像素包括被配置为将辐射或光转换成电荷的转换元件和设置在绝缘基板上的开关元件。 驱动线设置在绝缘基板上，并与行方向配置的开关元件连接， 并且信号线连接到沿列方向布置的开关元件。 每个转换元件设置在对应的开关元件上方。 利用位于位于位于转换元件下方的开关元件的主电极的最上表面部分下方的驱动线的最上表面部分下方的绝缘层中的导电层来实现驱动线。
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公开(公告)号：US07723695B2
公开(公告)日：2010-05-25
申请号：US11692671
申请日：2007-03-28
IPC分类号： G01T1/208
CPC分类号： H01L27/14659
摘要： This imaging apparatus has pixels arranged in a matrix shape on a substrate, each of which has a conversion element and the first TFT, wherein the first TFT is connected to the first gate wiring and signal wiring, and the conversion element is connected to bias wiring. The imaging apparatus has the second TFT 6 that is arranged outside a region in which the pixels are arranged. The signal wirings are mutually connected through the second TFT 6 outside a region in which the pixels are arranged. When the apparatus is driven, the second TFT is turned off.
摘要翻译： 该成像装置具有在基板上排列成矩阵状的像素，每个像素具有转换元件和第一TFT，其中第一TFT连接到第一栅极布线和信号布线，并且转换元件连接到偏置布线 。 成像装置具有布置在像素排列的区域的外侧的第二TFT 6。 信号布线通过第二TFT 6在像素排列的区域之外相互连接。 当该装置被驱动时，第二个TFT被关闭。
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公开(公告)号：US07638772B2
公开(公告)日：2009-12-29
申请号：US12034969
申请日：2008-02-21
IPC分类号： G01T1/24
CPC分类号： G01T1/2928 , H01L27/14658 , H01L27/14692
摘要： An imaging apparatus includes a plurality of pixels disposed on an insulation substrate. Each of the pixels includes a plurality of thin-film transistors, a conversion element disposed above the TFTs, and a plurality of insulating layers disposed between the conversion element and the plurality of TFTs. The plurality of TFTs includes a reading TFT having a gate electrode electrically connected to the conversion element and a first selecting TFT electrically connected to a source electrode or a drain electrode of the reading TFT. At least one of a signal wiring, to which a signal corresponding to an electric charge obtained by conversion of incident light or radiation performed by the conversion element is transferred, and a gate wiring that supplies a driving signal to a gate electrode of the first selecting thin-film transistor, is disposed between the plurality of insulating layers.
摘要翻译： 成像装置包括设置在绝缘基板上的多个像素。 每个像素包括多个薄膜晶体管，设置在TFT上方的转换元件以及设置在转换元件和多个TFT之间的多个绝缘层。 多个TFT包括具有与转换元件电连接的栅电极的读取TFT和与读取TFT的源电极或漏电极电连接的第一选择TFT。 信号布线中的至少一个传输与通过转换元件进行的入射光或辐射的转换获得的电荷相对应的信号的信号线以及向第一选择的栅电极提供驱动信号的栅极布线 薄膜晶体管，设置在多个绝缘层之间。
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公开(公告)号：US07550731B2
公开(公告)日：2009-06-23
申请号：US11750719
申请日：2007-05-18
IPC分类号： G01T1/24 , H01L27/146
CPC分类号： H01L27/14665
摘要： A conversion apparatus includes a pixel region, on a substrate, including a plurality of pixels arranged in a matrix, with each pixel having a conversion element that converts radiation into electric charges, and a switching element. The switching element has a structure having a gate electrode, a first insulating layer, a second insulating layer, and a semiconductor layer from the substrate side in this order. The conversion element has an MIS-type structure of a bottom electrode arranged on an insulating layer extending from the first insulating layer of the switching element and being vertically higher than the gate electrode of the switching element, an insulating layer which is formed of the same layer as the second insulating layer of the switching element, and a semiconductor layer which is formed of the same layer as the semiconductor layer of the switching element from the substrate side in this order.
摘要翻译： 转换装置包括在基板上的像素区域，其包括以矩阵形式布置的多个像素，每个像素具有将辐射转换成电荷的转换元件和开关元件。 开关元件具有从基板侧依次具有栅电极，第一绝缘层，第二绝缘层和半导体层的结构。 转换元件具有底部电极的MIS型结构，该底部电极布置在从开关元件的第一绝缘层延伸并垂直于开关元件的栅电极的绝缘层上，由其形成的绝缘层 作为开关元件的第二绝缘层的层，以及从基板侧依次形成与开关元件的半导体层相同的层的半导体层。
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6.发明授权公开(公告)号：US07535506B2
公开(公告)日：2009-05-19
申请号：US10537907
申请日：2004-02-10
CPC分类号： H04N5/32 , H01L27/14603 , H01L27/14658
摘要： A solid-state image pickup device according to the present invention has a plurality of photoelectric conversion elements and a plurality of switching elements. The photoelectric conversion element is formed above at least one switching element, and a shielding electrode layer is disposed between the switching elements and the photoelectric conversion elements. Further, a radiation image pickup device according to the present invention has a radiation conversion layer for directly converting radiation into electric charges, and a plurality of switching elements, and has the radiation conversion layer formed above one or more switching elements, and a shielding electrode layer disposed between the switching elements and the radiation conversion layer.
摘要翻译： 根据本发明的固态图像拾取装置具有多个光电转换元件和多个开关元件。 光电转换元件形成在至少一个开关元件上方，并且屏蔽电极层设置在开关元件和光电转换元件之间。 此外，根据本发明的放射线摄像装置具有用于将辐射直接转换为电荷的辐射转换层和多个开关元件，并且具有形成在一个或多个开关元件上方的辐射转换层和屏蔽电极 层之间设置在开关元件和辐射转换层之间。
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7.发明申请IMAGING APPARATUS, RADIATION IMAGING APPARATUS, AND MANUFACTURING METHODS THEREFOR 有权成像装置，放射成像装置及其制造方法公开(公告)号：US20090075405A1
公开(公告)日：2009-03-19
申请号：US12273602
申请日：2008-11-19
IPC分类号： H01L21/66
CPC分类号： H01L27/14603 , H01L27/1462 , H01L27/14632 , H01L27/14665 , H01L27/14685 , H01L27/14687 , H01L27/14692
摘要： An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.
摘要翻译： 提供了一种成像装置，其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方，并且插入在转换元件和薄膜晶体管之间的绝缘膜，其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分，薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素，其中通过激光束照射去除接触孔部分，使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ，停产。
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8.发明授权Radiographic imaging substrate, radiographic imaging apparatus, and radiographic imaging system 有权射线照相成像基片，放射成像装置和放射成像系统公开(公告)号：US07465933B2
公开(公告)日：2008-12-16
申请号：US11957843
申请日：2007-12-17
IPC分类号： G01T1/20 , H01L27/146
CPC分类号： H01L27/14636 , H01L27/14603 , H01L27/14609 , H01L27/14663 , H01L27/14676 , H01L27/14687
摘要： A radiographic imaging apparatus, comprising: a photoelectric conversion substrate including a pixel area where there are arranged a plurality of pixels each formed of a photoelectric conversion element and a switching element connected to the photoelectric conversion element in a matrix formed on an insulating substrate, a bias line for applying a bias to the photoelectric conversion element, a gate line for supplying a driving signal to the switching element, and a signal line for reading electric charges converted in the photoelectric conversion element; a wavelength conversion element for converting radiation to light that can be detected by the photoelectric conversion element, the wavelength conversion element being disposed according to a region including the pixel area; and connection wiring having a photoelectric conversion layer connected to at least a plurality of lines of an identical type of the bias line, the signal line, and the gate line, wherein at least a part of the connection wiring is arranged between the region on the insulating substrate and an edge of the insulating, With this arrangement, it becomes possible to provide a panel for a radiographic imaging apparatus and a radiographic imaging apparatus free from deterioration in device performance and device destruction caused by a static electricity even if a substrate is electricity charged in a manufacturing process.
摘要翻译： 一种放射线摄影成像装置，包括：光电转换基板，包括像素区域，其中排列有由光电转换元件形成的多个像素和连接到形成在绝缘基板上的矩阵中的光电转换元件的开关元件， 用于向光电转换元件施加偏压的偏置线，用于向开关元件提供驱动信号的栅极线和用于读取在光电转换元件中转换的电荷的信号线; 波长转换元件，用于将辐射转换成能够由光电转换元件检测的光，所述波长转换元件根据包括像素区域的区域设置; 以及连接布线，其具有连接到相同类型的偏置线，信号线和栅极线的至少多条线的光电转换层，其中连接布线的至少一部分布置在 绝缘基板和绝缘体的边缘。通过这种布置，可以提供一种用于放射线照相成像装置和放射线照相成像装置的面板，即使在基板是电的情况下，也不会导致静电导致的装置性能和装置破坏的劣化 在制造过程中充电。
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公开(公告)号：US20080203311A1
公开(公告)日：2008-08-28
申请号：US12034969
申请日：2008-02-21
IPC分类号： G01T1/24
CPC分类号： G01T1/2928 , H01L27/14658 , H01L27/14692
摘要： An imaging apparatus includes a plurality of pixels disposed on an insulation substrate. Each of the pixels includes a plurality of thin-film transistors, a conversion element disposed above the TFTs, and a plurality of insulating layers disposed between the conversion element and the plurality of TFTs. The plurality of TFTs includes a reading TFT having a gate electrode electrically connected to the conversion element and a first selecting TFT electrically connected to a source electrode or a drain electrode of the reading TFT. At least one of a signal wiring, to which a signal corresponding to an electric charge obtained by conversion of incident light or radiation performed by the conversion element is transferred, and a gate wiring that supplies a driving signal to a gate electrode of the first selecting thin-film transistor, is disposed between the plurality of insulating layers.
摘要翻译： 成像装置包括设置在绝缘基板上的多个像素。 每个像素包括多个薄膜晶体管，设置在TFT上方的转换元件以及设置在转换元件和多个TFT之间的多个绝缘层。 多个TFT包括具有与转换元件电连接的栅电极的读取TFT和与读取TFT的源电极或漏电极电连接的第一选择TFT。 信号布线中的至少一个传输与通过转换元件进行的入射光或辐射的转换获得的电荷相对应的信号的信号线以及向第一选择的栅电极提供驱动信号的栅极布线 薄膜晶体管，设置在多个绝缘层之间。
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公开(公告)号：US20070272870A1
公开(公告)日：2007-11-29
申请号：US11751702
申请日：2007-05-22
IPC分类号： G01T1/24 , H01L27/146 , H01L25/00 , H01L27/00
CPC分类号： H01L27/14643 , G01T1/2018 , G01T1/24 , H01L27/14603 , H01L27/14632 , H01L27/14663 , H01L27/14692 , H01L31/105
摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.
摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。
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