利索-全球专利检索

  1. 登录
  2. 注册
发明授权
US07410251B2 Apparatus for forming a thin film using an inkjet printing method 失效
使用喷墨打印方法形成薄膜的装置

Apparatus for forming a thin film using an inkjet printing method
摘要：
In an apparatus of forming a thin film, the apparatus has a printing chamber that forms a thin film on a substrate. The apparatus has at least two drying chambers that receive the substrate on which the thin film is formed and dry the thin film on the substrate. The two drying chambers may be independently controlled. Accordingly, the apparatus may reduce process time for forming the thin film without contamination of the substrate.
摘要（中）：

在形成薄膜的装置中，该装置具有在基板上形成薄膜的印刷室。 该装置具有至少两个干燥室，其接收其上形成有薄膜的基板，并干燥基板上的薄膜。 两个干燥室可以独立控制。 因此，该装置可以减少用于形成薄膜的处理时间，而不会污染基板。

公开/授权文献
信息查询
Espacenet
0/0