发明授权
- 专利标题: Polarized UV exposure system
- 专利标题(中): 极化UV曝光系统
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申请号: US10858998申请日: 2004-06-02
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公开(公告)号: US07413317B2公开(公告)日: 2008-08-19
- 发明人: Jeffrey L. Solomon , Michael C. Lea , Richard C. Allen
- 申请人: Jeffrey L. Solomon , Michael C. Lea , Richard C. Allen
- 申请人地址: US MN St. Paul
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: US MN St. Paul
- 代理商 Jay R. Pralle
- 主分类号: F21V9/14
- IPC分类号: F21V9/14
摘要:
A light exposure system is used to expose an alignment layer formed of anistropically absorbing molecules so as to allow alignment of subsequently applied liquid crystal polymer (LCP) molecules. The light incident on the alignment layer is polarized. When a single polarizer is used, the azimuthal polarization direction varies across the substrate carrying the alignment layer. Various approaches to reducing the azimuthal polarization variation may be adopted, including the introduction of various types of polarization rotation reduction element and in selecting an appropriate tilt angle for the light source. Furthermore, a reflective structure may be inserted between the light source and the alignment layer. Use of the reflective structure increases the total amount of light incident on the alignment layer.
公开/授权文献
- US20050270617A1 Polarized UV exposure system 公开/授权日:2005-12-08
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