发明授权
- 专利标题: Crystal base plate and pressing device
- 专利标题(中): 水晶基板和压制装置
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申请号: US10523168申请日: 2003-09-18
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公开(公告)号: US07413430B2公开(公告)日: 2008-08-19
- 发明人: Sunao Kurimura , Masaki Harada
- 申请人: Sunao Kurimura , Masaki Harada
- 申请人地址: JP Tsukuba-shi, Ibaraki
- 专利权人: National Institute for Materials Science
- 当前专利权人: National Institute for Materials Science
- 当前专利权人地址: JP Tsukuba-shi, Ibaraki
- 代理机构: Frishauf, Holtz, Goodman & Chick, P.C.
- 优先权: JP2002-276001 20020920
- 国际申请: PCT/JP03/11882 WO 20030918
- 国际公布: WO2004/027125 WO 20040401
- 主分类号: A01J21/00
- IPC分类号: A01J21/00 ; B29B15/00 ; G02F2/02 ; C30B29/18
摘要:
The upper block 12 contacts the bearing block 20, and the bearing block 20 is coupled to the upper plate 21. The upper block 12 has a protruding part 22 on the upper surface that is worked into a convex surface with a radius of R1, and the bearing block 20 has a recessed part 23 in the undersurface that is worked into a concave surface with a radius of R2 (R2>R1). As a result of such a construction being used, the pressing surface of the upper pressing plate 15 always conforms to the surface of the quartz crystal substrate 11 during pressing, so that a uniform load is applied to the quartz crystal substrate 11. As a result, the surface of the quartz crystal can be uniformly pressed in the hot pressing method.
公开/授权文献
- US20050225215A1 Crystal base plate and pressing device 公开/授权日:2005-10-13
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