发明授权
US07420729B2 Small thin film movable element, small thin film movable element array and method of driving small thin film movable element
失效
小薄膜可移动元件，小薄膜可移动元件阵列及小薄膜可移动元件的驱动方法
- 专利标题： Small thin film movable element, small thin film movable element array and method of driving small thin film movable element
- 专利标题（中）： 小薄膜可移动元件，小薄膜可移动元件阵列及小薄膜可移动元件的驱动方法
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申请号： US11482737申请日： 2006-07-10
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公开(公告)号： US07420729B2公开(公告)日： 2008-09-02
- 发明人: Fumihiko Mochizuki , Hirochika Nakamura
- 申请人： Fumihiko Mochizuki , Hirochika Nakamura
- 申请人地址： JP Tokyo
- 专利权人： FUJIFILM Corporation
- 当前专利权人： FUJIFILM Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Sughrue Mion, PLLC
- 优先权： JPP2005-200368 20050708
- 主分类号： G02B26/00
- IPC分类号： G02B26/00
摘要：
A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the movable portion comprises a vibration applying unit that applies a vibration to the movable portion at least immediately before displacing operation of the movable portion.