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公开(公告)号：US08222158B2
公开(公告)日：2012-07-17
申请号：US12832077
申请日：2010-07-08
申请人： Fumihiko Mochizuki , Atsushi Tanaka
发明人： Fumihiko Mochizuki , Atsushi Tanaka
IPC分类号： H01L21/302
CPC分类号： H01L21/02631 , H01L21/02554 , H01L21/02565 , H01L27/1225 , H01L29/7869
摘要： A method of manufacturing an electronic device includes: preparing a film-attached substrate including a substrate, and an oxide semiconductor film containing In, Ga, and Zn and a metal film containing at least one of W or Mo provided in this order on the substrate; and wet-etching the metal film of the film-attached substrate using an etching liquid of which a main component is hydrogen peroxide under conditions such that an etching selection ratio between the metal film and the oxide semiconductor film (etching rate of the metal film/etching rate of the oxide semiconductor film) is 100 or higher.
摘要翻译： 一种制造电子器件的方法包括：制备包括衬底的膜附着衬底和包含In，Ga和Zn的氧化物半导体膜以及在衬底上依次提供包含W或Mo中的至少一种的金属膜 ; 在主要成分为过氧化氢的蚀刻液中，使金属膜与氧化物半导体膜之间的蚀刻选择比（金属膜/氧化物半导体膜的蚀刻速度）的条件，湿式蚀刻附着有膜的基板的金属膜， 氧化物半导体膜的蚀刻速度）为100以上。
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2.发明申请公开(公告)号：US20110006300A1
公开(公告)日：2011-01-13
申请号：US12832077
申请日：2010-07-08
申请人： Fumihiko MOCHIZUKI , Atsushi TANAKA
发明人： Fumihiko MOCHIZUKI , Atsushi TANAKA
CPC分类号： H01L21/02631 , H01L21/02554 , H01L21/02565 , H01L27/1225 , H01L29/7869
摘要： A method of manufacturing an electronic device includes: preparing a film-attached substrate including a substrate, and an oxide semiconductor film containing In, Ga, and Zn and a metal film containing at least one of W or Mo provided in this order on the substrate; and wet-etching the metal film of the film-attached substrate using an etching liquid of which a main component is hydrogen peroxide under conditions such that an etching selection ratio between the metal film and the oxide semiconductor film (etching rate of the metal film/etching rate of the oxide semiconductor film) is 100 or higher.
摘要翻译： 一种制造电子器件的方法包括：制备包括衬底的膜附着衬底和包含In，Ga和Zn的氧化物半导体膜以及在衬底上依次提供包含W或Mo中的至少一种的金属膜 ; 在主要成分为过氧化氢的蚀刻液中，使金属膜与氧化物半导体膜之间的蚀刻选择比（金属膜/氧化物半导体膜的蚀刻速度）的条件，湿式蚀刻附着有膜的基板的金属膜， 氧化物半导体膜的蚀刻速度）为100以上。
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公开(公告)号：US20090236933A1
公开(公告)日：2009-09-24
申请号：US12405714
申请日：2009-03-17
IPC分类号： H01L41/053
CPC分类号： H01L41/332 , H01L41/0477 , H01L41/0533 , H01L41/0805 , H01L41/23 , Y10T29/42
摘要： A piezoelectric device includes a lower electrode, a piezoelectric film and an upper electrode laminated in this order on a support. An oxide film containing a material that forms a lower electrode is formed on a side surface of the piezoelectric film. The piezoelectric device is produced such that an upper electrode and a piezoelectric film are patterned by dry-etching through a mask formed on a side of the upper electrode of the piezoelectric device member and thereafter a side surface of the patterned piezoelectric film (a film adhered to a side wall) is oxidized to form an oxide film.
摘要翻译： 压电装置包括依次层叠在支撑体上的下电极，压电膜和上电极。 包含形成下电极的材料的氧化物膜形成在压电膜的侧表面上。 制造压电器件，使得通过干法蚀刻来形成上电极和压电膜，通过形成在压电器件元件的上电极一侧的掩模，然后将图案化的压电膜的侧表面 到侧壁）被氧化以形成氧化膜。
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4.发明授权Spatial light modulator, spatial light modulator array, image forming device and flat panel display 失效空间光调制器，空间光调制器阵列，图像形成装置和平板显示器公开(公告)号：US06930816B2
公开(公告)日：2005-08-16
申请号：US10758278
申请日：2004-01-16
申请人： Fumihiko Mochizuki
发明人： Fumihiko Mochizuki
CPC分类号： G02B26/001 , G02B6/3524 , G02B6/357 , G02B26/02
摘要： A spatial light modulator has: a support substrate that has an electrode layer; and a movable thin film that has at least an electrode layer, and that is opposingly placed above the support substrate with being separated by a predetermined gap distance in a manner that the movable thin film is flexurally deformable toward the support substrate, and in which a predetermined driving voltage is applied between the electrode layer of the support substrate and the electrode layer of the movable thin film to cause the movable thin film to be deflected toward the support substrate by an electrostatic force acting between the electrode layers. A returning electrode is disposed on an side of the movable thin film opposite to the side which is opposed to the support substrate to apply an electrostatic force of attracting the movable thin film when a driving voltage is applied.
摘要翻译： 空间光调制器具有：具有电极层的支撑基板; 以及至少具有电极层的可移动薄膜，并且相对地设置在支撑基板上方，以可移动薄膜朝向支撑基板弯曲变形的方式分隔预定间隙距离，并且其中 在支撑基板的电极层和可动薄膜的电极层之间施加预定的驱动电压，通过作用在电极层之间的静电力使可动薄膜向支撑基板偏转。 返回电极设置在可动薄膜的与支撑基板相对的一侧相反的一侧，以在施加驱动电压时施加吸引可动薄膜的静电力。
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5.发明授权公开(公告)号：US06667794B2
公开(公告)日：2003-12-23
申请号：US09960340
申请日：2001-09-24
IPC分类号： C09K1902
CPC分类号： G02B5/3016 , G02F1/1336 , G02F2001/133521 , G02F2001/133545 , G02F2001/133607
摘要： A flat plate collimator and backlight system capable of improving the display characteristics of liquid crystal display devices are obtained. In order to achieve this end, a collimator is provided which comprises a cholesteric liquid crystal layer exhibiting a selective-reflection wavelength band with respect to perpendicularly-incident light in the wavelength range &lgr;1 to &lgr;2 (&lgr;1
摘要翻译： 可以获得能够改善液晶显示装置的显示特性的平板准直器和背光系统。 为了实现这一目的，提供了一种准直器，其包括相对于波长λ1至λ2（λ1
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公开(公告)号：US20090085443A1
公开(公告)日：2009-04-02
申请号：US12232983
申请日：2008-09-26
IPC分类号： H01L41/047 , B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J2002/1425 , H01L41/0973 , H01L41/1876 , H01L41/316
摘要： The piezoelectric device includes a substrate, a first electrode deposited on the substrate, a piezoelectric film deposited on top of at least a part of the first electrode by vapor phase deposition, a second electrode deposited on the piezoelectric film and having a water vapor transmission rate of not more than 1 g/m2/day, and at least one protective film that covers at least peripheries of the second electrode and the piezoelectric film and which has an opening in a position corresponding to the piezoelectric film except the periphery thereof. The piezoelectric device has satisfactory moisture resistance and is capable of effectively preventing the ingress of moisture into the piezoelectric film.
摘要翻译： 所述压电元件包括基板，沉积在所述基板上的第一电极，通过气相沉积沉积在所述第一电极的至少一部分的顶部上的压电膜，沉积在所述压电膜上的第二电极，并具有水蒸汽透过率 以及至少覆盖第二电极和压电膜的周围的至少一个保护膜，并且在与除了其外围的压电膜相对应的位置具有开口。 该压电元件具有令人满意的耐湿性，能够有效地防止湿气进入压电膜。
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7.发明授权Small thin film movable element, small thin film movable element array and method of driving small thin film movable element 失效小薄膜可移动元件，小薄膜可移动元件阵列及小薄膜可移动元件的驱动方法公开(公告)号：US07420729B2
公开(公告)日：2008-09-02
申请号：US11482737
申请日：2006-07-10
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B6/3556 , G02B6/3564
摘要： A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the movable portion comprises a vibration applying unit that applies a vibration to the movable portion at least immediately before displacing operation of the movable portion.
摘要翻译： 小薄膜可移动元件包括：可弹性变形地支撑的可移动部分，并且在可移动部分的至少一部分上具有可动电极; 以及与所述可动部相对设置的固定电极，其中，所述可动部根据施加到所述可动电极和所述固定电极的电压，通过静电力而位移，并且其中，所述可动部包括施加于所述可动部的振动施加部 至少在可移动部分的移动操作之前立即向可动部分发出振动。
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8.发明授权Optical functional film, method of forming the same, and spatial light modulator, spatial light modulator array, image forming device and flat panel display using the same 有权光学功能膜，其形成方法，空间光调制器，空间光调制器阵列，成像装置和使用其的平板显示器公开(公告)号：US07233029B2
公开(公告)日：2007-06-19
申请号：US10758286
申请日：2004-01-16
申请人： Fumihiko Mochizuki
发明人： Fumihiko Mochizuki
CPC分类号： G02B5/0825 , G02B26/001 , G02B26/0841 , H01L27/14627 , H01L27/14685
摘要： An optical functional film comprises a multilayer film formed by stacking a plurality of films. The plurality of films are formed by a same material and refractive indices of adjacent films are different.
摘要翻译： 光学功能膜包括通过堆叠多个膜形成的多层膜。 多个膜由相同的材料形成，相邻膜的折射率不同。
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9.发明申请Small thin film movable element, small thin film movable element array and method of driving small thin film movable element 失效小薄膜可移动元件，小薄膜可移动元件阵列及小薄膜可移动元件的驱动方法公开(公告)号：US20070008674A1
公开(公告)日：2007-01-11
申请号：US11482737
申请日：2006-07-10
IPC分类号： H01G7/02
CPC分类号： G02B26/0841 , G02B6/3556 , G02B6/3564
摘要： A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the movable portion comprises a vibration applying unit that applies a vibration to the movable portion at least immediately before displacing operation of the movable portion.
摘要翻译： 小薄膜可移动元件包括：可弹性变形地支撑的可移动部分，并且在可移动部分的至少一部分上具有可动电极; 以及与所述可动部相对设置的固定电极，其中，所述可动部根据施加到所述可动电极和所述固定电极的电压，通过静电力而位移，并且其中，所述可动部包括施加于所述可动部的振动施加部 至少在可移动部分的移动操作之前立即向可动部分发出振动。
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公开(公告)号：US08053955B2
公开(公告)日：2011-11-08
申请号：US12405714
申请日：2009-03-17
IPC分类号： H01L41/047
CPC分类号： H01L41/332 , H01L41/0477 , H01L41/0533 , H01L41/0805 , H01L41/23 , Y10T29/42
摘要： A piezoelectric device includes a lower electrode, a piezoelectric film and an upper electrode laminated in this order on a support. An oxide film containing a material that forms a lower electrode is formed on a side surface of the piezoelectric film. The piezoelectric device is produced such that an upper electrode and a piezoelectric film are patterned by dry-etching through a mask formed on a side of the upper electrode of the piezoelectric device member and thereafter a side surface of the patterned piezoelectric film (a film adhered to a side wall) is oxidized to form an oxide film.
摘要翻译： 压电装置包括依次层叠在支撑体上的下电极，压电膜和上电极。 包含形成下电极的材料的氧化物膜形成在压电膜的侧表面上。 制造压电器件，使得通过干法蚀刻来形成上电极和压电膜，通过形成在压电器件元件的上电极一侧的掩模，然后将图案化的压电膜的侧表面 到侧壁）被氧化以形成氧化膜。
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