发明授权
- 专利标题: Method for manufacturing a piezoelectric vibration device
- 专利标题(中): 压电振动装置的制造方法
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申请号: US11428097申请日: 2006-06-30
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公开(公告)号: US07421767B2公开(公告)日: 2008-09-09
- 发明人: Shinya Aoki
- 申请人: Shinya Aoki
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2005-197081 20050706
- 主分类号: H04R17/00
- IPC分类号: H04R17/00 ; H05K3/36
摘要:
Manufacturing a piezoelectric vibration device, includes: forming a bonding electrode on a part of a piezoelectric substrate to which a cover makes contact; forming a part defining a through hole to the cover so that a profile of an edge of an opening of the through hole at a first surface of the cover is positioned inside an outer shape of the taking out electrode in a plan view when the cover and the piezoelectric substrate are overlapped; forming a first glass film on the first surface of the cover; forming a second glass film on the first surface of the cover; bonding the first glass film to the taking out electrode as well as the second glass film to the bonding electrode by generating an electric field; and cutting an electrical coupling between the taking out electrode and the bonding electrode after step (e).
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