发明授权
US07423365B2 Surface acoustic wave device 有权
表面声波装置

Surface acoustic wave device
摘要:
A surface acoustic wave device includes at least one interdigital transducer having electrodes of a double-layered structure in which an upper film and an underlying film are laminated. The upper film has a main component of Al and a first metal of Ti added to the main component. The underlying film has a main component of Ti.
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