发明授权
- 专利标题: Surface acoustic wave device
- 专利标题(中): 表面声波装置
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申请号: US11139040申请日: 2005-05-27
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公开(公告)号: US07423365B2公开(公告)日: 2008-09-09
- 发明人: Jun Tsutsumi , Shogo Inoue , Masanori Ueda
- 申请人: Jun Tsutsumi , Shogo Inoue , Masanori Ueda
- 申请人地址: JP Yokohama JP Kawasaki
- 专利权人: Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人: Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址: JP Yokohama JP Kawasaki
- 代理机构: Arent Fox LLP
- 优先权: JP2004-162611 20040531
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A surface acoustic wave device includes at least one interdigital transducer having electrodes of a double-layered structure in which an upper film and an underlying film are laminated. The upper film has a main component of Al and a first metal of Ti added to the main component. The underlying film has a main component of Ti.
公开/授权文献
- US20050264136A1 Surface acoustic wave device 公开/授权日:2005-12-01
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