发明授权
- 专利标题： Solid immersion lens and microscope
- 专利标题（中）： 固体浸没镜片和显微镜
-
申请号： US10804194申请日： 2004-03-19
-
公开(公告)号： US07423816B2公开(公告)日： 2008-09-09
- 发明人: Hirotoshi Terada , Ikuo Arata , Shigeru Sakamoto
- 申请人： Hirotoshi Terada , Ikuo Arata , Shigeru Sakamoto
- 申请人地址： JP Hamamatsu-shi, Shizuoka
- 专利权人： Hamamatsu Photonics K.K.
- 当前专利权人： Hamamatsu Photonics K.K.
- 当前专利权人地址： JP Hamamatsu-shi, Shizuoka
- 代理机构： Drinker Biddle & Reath LLP
- 优先权： JP2003-078819 20030320; JP2003-146620 20030523; JP2003-373059 20031031
- 主分类号： G02B3/02
- IPC分类号： G02B3/02
摘要：
A solid immersion lens 1 comprises a spherical portion 2 and a bottom surface portion 3. The bottom surface portion 3 is attached in close contact with a substrate 10 of a semiconductor device to be an observed object. The bottom surface portion 3 of this solid immersion lens 1 is formed in a cylindrical shape. Thereby, a solid immersion lens which can be easily separated from the observed object after an observation and can, during an observation, allow a light flux with a high NA to pass and a microscope using the same can be obtained.
公开/授权文献
- US20070183057A1 Solid immersion lens and microscope 公开/授权日：2007-08-09
信息查询
IPC分类:
| G | 物理 |
| G02 | 光学 |
| G02B | 光学元件、系统或仪器 |
| G02B3/00 | 简单或复合透镜 |
| G02B3/02 | .具有非球面的（G02B3/10优先） |
