发明授权
- 专利标题: Measuring apparatus for work held by chuck table, and laser beam machining apparatus
-
申请号: US12006530申请日: 2008-01-03
-
公开(公告)号: US07428062B2公开(公告)日: 2008-09-23
- 发明人: Keiji Nomaru
- 申请人: Keiji Nomaru
- 申请人地址: JP Tokyo
- 专利权人: Disco Corporation
- 当前专利权人: Disco Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Greer, Burns & Crain, Ltd.
- 优先权: JP2007-005709 20070115
- 主分类号: G01B11/24
- IPC分类号: G01B11/24 ; G03B21/14 ; G02B21/00
摘要:
An apparatus for measuring the height of a work held by a chuck table provided in a machining apparatus, including: a white light source for emitting a white beam of light; a chromatic aberration lens for condensing the white beam emitted from the white light source; a beam splitter which is disposed between the white light source and the chromatic aberration lens and by which a reflected beam of the white beam irradiating the work therewith is split; a first condenser lens for condensing the reflected beam split by the beam splitter; a diffraction grating by which the reflected beam condensed by the first condenser lens is converted into a diffracted beam; a second condenser lens for condensing the diffracted beam diffracted by the diffraction grating; and a wavelength detecting unit for detecting the wavelength of the diffracted beam condensed by the second condenser lens.
公开/授权文献
信息查询