公开(公告)号：US08847108B2

公开(公告)日：2014-09-30

申请号：US12430522

申请日：2009-04-27

申请人： Satoshi Kobayashi ,  Keiji Nomaru

发明人： Satoshi Kobayashi ,  Keiji Nomaru

IPC分类号： B23K26/00 ,  B23K26/067 ,  B23K26/04 ,  B23K26/40 ,  B28D5/04

CPC分类号： B23K26/046 ,  B23K26/40 ,  B23K26/53 ,  B23K2103/50 ,  B28D5/04

摘要： A laser beam machining apparatus includes a height position detecting unit configured to detect the height position of an upper surface of a workpiece to be machined which is held on a chuck table, and a controller configured to control a condensing point position adjusting unit on the basis of a detection signal from the height position detecting unit. The height position detecting unit includes a detection laser beam oscillating unit configured to oscillate a detection laser beam having a wavelength different from the wavelength of the machining laser beam, and a reflected beam analyzing unit which analyzes a reflected beam generated upon reflection of the detection laser beam on the upper surface of the workpiece and which sends an analytical results to the controller. The laser beam machining apparatus further includes a condensing point position displacing unit configured to displace the condensing point position of the detection laser beam and the condensing point position of the machining laser beam.

摘要翻译： 一种激光束加工装置，包括：高度位置检测单元，被配置为检测保持在卡盘台上的待加工工件的上表面的高度位置;以及控制器，其基于该控制器来控制聚光点位置调整单元 来自高度位置检测单元的检测信号。 高度位置检测单元包括：检测激光束振荡单元，被配置为振荡具有与加工激光束的波长不同的波长的检测激光束;以及反射光束分析单元，其分析在检测激光器反射时产生的反射光束 在工件的上表面上射束，并将分析结果发送给控制器。 激光束加工装置还包括：凝结点位置移动单元，被配置为移动检测激光束的聚光点位置和加工激光束的聚光点位置。

公开(公告)号：US08513566B2

公开(公告)日：2013-08-20

申请号：US11979936

申请日：2007-11-09

申请人： Hiroshi Morikazu ,  Keiji Nomaru

发明人： Hiroshi Morikazu ,  Keiji Nomaru

IPC分类号： B23K26/02 ,  B23K26/38

CPC分类号： B23K26/0853 ,  B23K26/067 ,  B23K26/0673 ,  B23K26/082 ,  B23K2101/40

摘要： A laser beam processing machine comprising a laser beam application means for applying a laser beam to a workpiece held on a chuck table and a processing-feed means, wherein the laser beam application means comprises a first pulse laser beam application means and a second pulse laser beam application means; the first pulse laser beam application means comprises an acousto-optic deflection means for deflecting the optical axis of a pulse laser beam oscillated by a first pulse laser beam oscillation means in the processing-feed direction (X direction), and a first condenser lens for converging a pulse laser beam passing through the acousto-optic deflection means; the second pulse laser beam application means comprises a second condenser lens for converging a pulse laser beam oscillated by the second pulse laser beam oscillation means; and an NA value of the first condenser lens is set smaller than the NA value of the second condenser lens.

摘要翻译： 一种激光束处理机，包括：激光束施加装置，用于将激光束施加到夹持在卡盘台上的工件;以及加工进给装置，其中所述激光束施加装置包括第一脉冲激光束施加装置和第二脉冲激光器 射束施加装置; 第一脉冲激光束施加装置包括用于使由第一脉冲激光束振荡装置在处理进给方向（X方向）上振荡的脉冲激光束的光轴偏转的声光偏转装置，以及用于 会聚通过声光偏转装置的脉冲激光束; 第二脉冲激光束施加装置包括用于会聚由第二脉冲激光束振荡装置振荡的脉冲激光束的第二聚光透镜; 并且将第一聚光透镜的NA值设定为小于第二聚光透镜的NA值。

公开(公告)号：US20130068740A1

公开(公告)日：2013-03-21

申请号：US13614073

申请日：2012-09-13

申请人： Keiji NOMARU

发明人： Keiji NOMARU

IPC分类号： B23K26/02

CPC分类号： B23K26/04 ,  B23K26/02 ,  B23K26/0622 ,  B23K26/08 ,  B23K26/0853 ,  B23K26/0876 ,  B23K2101/40 ,  B41J2/1634 ,  B41J2/465

摘要： A pulsed laser beam is applied to a workpiece held on a chuck table by a laser beam applying unit. The laser beam applying unit includes a pulsed laser beam oscillator, a focusing lens, and a piezoelectric motor for displacing the focusing unit in a direction inclined at a predetermined angle (α) with respect to the Z direction. A controller controls the frequency and voltage of an RF current to be applied to the piezoelectric motor in relation to the repetition frequency of the pulsed laser beam to move the focusing unit in the X direction by Δx and in the Z direction by Δz in feeding the chuck table in the X direction, thereby displacing the focal point of the pulsed laser beam to be focused by the focusing lens in the thickness direction of the workpiece held on the chuck table.

摘要翻译： 通过激光束施加单元将脉冲激光束施加到夹持在卡盘台上的工件。 激光束施加单元包括脉冲激光束振荡器，聚焦透镜和用于使聚焦单元沿相对于Z方向以预定角度（α）倾斜的方向移位的压电马达。 控制器控制相对于脉冲激光束的重复频率施加到压电电动机的RF电流的频率和电压，以使聚焦单元沿X方向移动＆Dgr; x并且在Z方向上移动＆Dgr; z在X方向上进给卡盘台，从而使被聚焦透镜聚焦的脉冲激光束的焦点沿保持在卡盘台上的工件的厚度方向移位。

公开(公告)号：US20120199565A1

公开(公告)日：2012-08-09

申请号：US13366728

申请日：2012-02-06

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/16

CPC分类号： B23K26/40 ,  B23K26/0626 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0652 ,  B23K26/067 ,  B23K2103/50

摘要： A laser beam applying mechanism has a power adjusting unit provided between a laser beam oscillator and a focusing lens. The power adjusting unit includes a half-wave plate, a prism having a first polarization beam splitter film and a second polarization beam splitter film. The optical path is adjusted by a piezoelectric actuator opposed to the first polarization beam splitter film, and a polarized light components synthesizer opposed to the second polarization beam splitter film generates a phase difference (β) between an S polarized light component and a P polarized light component. The phase difference (β) between the S polarized light component and the P polarized light component of the laser beam obtained by the polarized light components synthesizer is in the range of 0° to 180°.

摘要翻译： 激光束施加机构具有设置在激光束振荡器和聚焦透镜之间的功率调节单元。 功率调整单元包括半波片，具有第一偏振分束膜和第二偏振分束膜的棱镜。 通过与第一偏振分束膜相对的压电致动器调节光路，与第二偏振分束膜相对的偏振光分量合成器在S偏振光分量和P偏振光分量膜之间产生相位差（＆amp; bgr） 光分量。 由偏振光分量合成器获得的S偏振光分量和激光束的P偏振光分量之间的相位差（＆bgr）在0°至180°的范围内。

公开(公告)号：US08143552B2

公开(公告)日：2012-03-27

申请号：US11899452

申请日：2007-09-06

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/14 ,  B23K26/16

CPC分类号： B23K26/073 ,  B23K26/0622 ,  B23K26/066 ,  B23K26/082 ,  B23K26/389

摘要： A laser beam machining system including a chuck table for holding a work, and a laser beam irradiation unit for irradiating the work held on the chuck table with a laser beam, wherein the laser beam irradiation unit includes: a pulsed laser beam oscillator for oscillating a pulsed laser beam; a condenser for condensing the pulsed laser beam oscillated from the pulsed laser beam oscillator; a laser beam scanning unit disposed between the pulsed laser beam oscillator and the condenser and operative to deflect the pulsed laser beam to be inputted to the condenser; and a laser beam reshaping unit which ids disposed between the pulsed laser beam oscillator and the laser beam scanning unit and by which the energy distribution of the pulsed laser beam oscillated from the pulsed laser beam oscillator is reshaped into a top hat shape.

摘要翻译： 一种激光束加工系统，包括：用于保持工件的卡盘台;激光束照射单元，用于用激光束照射夹持台上的作业，其中所述激光束照射单元包括：脉冲激光束振荡器， 脉冲激光束; 用于聚集从脉冲激光束振荡器振荡的脉冲激光束的聚光器; 激光束扫描单元，设置在所述脉冲激光束振荡器和所述冷凝器之间，并且可操作以使要输入到所述冷凝器的所述脉冲激光束偏转; 以及激光束整形单元，其设置在脉冲激光束振荡器和激光束扫描单元之间，并且脉冲激光束从脉冲激光束振荡器振荡的能量分布重新形成顶帽形状。

公开(公告)号：US08124909B2

公开(公告)日：2012-02-28

申请号：US12415196

申请日：2009-03-31

申请人： Taiki Sawabe ,  Keiji Nomaru

发明人： Taiki Sawabe ,  Keiji Nomaru

IPC分类号： B23K26/14

CPC分类号： B23K26/046 ,  B23K26/082 ,  B23K26/0853 ,  B23K26/364 ,  B23K26/40 ,  B23K2103/50 ,  H01L21/78

摘要： A laser processing apparatus including a height detecting device for detecting the height of a workpiece held on a chuck table. The height detecting device includes an annular spot forming unit for forming the spot shape of a detecting laser beam into an annular spot shape, a pinhole mask for passing the reflected light reflected on the upper surface of the workpiece held on the chuck table, but blocking the reflected light reflected on the lower surface of the workpiece, and a reflected light analyzing unit for analyzing the reflected light passed through the pinhole mask and transmitting the result of analyzation to a control unit. The laser processing apparatus further includes a focusing unit having an objective lens for focusing a processing laser beam having a circular spot shape and the detecting laser beam having the annular spot shape and a window lens for focusing the detecting laser beam focused by the objective lens without focusing the processing laser beam.

摘要翻译： 一种激光加工设备，包括用于检测保持在卡盘台上的工件的高度的高度检测装置。 高度检测装置包括环形斑点形成单元，用于将检测激光束的斑点形状形成为环形斑点形状;针孔掩模，用于使被反射在保持在卡盘台上的工件的上表面上反射的反射光通过，但阻塞 在工件的下表面上反射的反射光和反射光分析单元，用于分析通过针孔掩模的反射光并将分析结果传送到控制单元。 该激光加工装置还包括聚焦单元，该聚焦单元具有用于聚焦具有圆形斑点形状的处理激光束和具有环形斑点形状的检测激光束的物镜和用于聚焦由物镜聚焦的检测激光束的窗口透镜，而没有 聚焦处理激光束。

公开(公告)号：US20100133243A1

公开(公告)日：2010-06-03

申请号：US12610718

申请日：2009-11-02

申请人： Keiji Nomaru ,  Taiki Sawabe

发明人： Keiji Nomaru ,  Taiki Sawabe

IPC分类号： B23K26/00

CPC分类号： B23K26/032 ,  B23K26/046 ,  B23K26/364

摘要： A laser processing apparatus including a detecting unit. The detecting unit includes a white light source for emitting white light, a focusing lens for focusing the white light to the workpiece, a first optical fiber for guiding the white light emitted from the white light source to the focusing lens, a detector for detecting the intensity of reflected light from the workpiece, and a second optical fiber for guiding the reflected light to the detector. Accordingly, the white light to be focused to the workpiece can be easily handled and only a wavelength component focused on the workpiece can be stably propagated.

摘要翻译： 一种激光加工装置，包括检测单元。 检测单元包括用于发射白光的白光源，用于将白光聚焦到工件的聚焦透镜，用于将从白光源发射的白光引导到聚焦透镜的第一光纤，用于检测白光的检测器 来自工件的反射光的强度和用于将反射光引导到检测器的第二光纤。 因此，可以容易地处理要聚焦到工件上的白色光，并且只有聚焦在工件上的波长分量能够稳定地传播。

公开(公告)号：US20090064521A1

公开(公告)日：2009-03-12

申请号：US12189910

申请日：2008-08-12

申请人： Taiki Sawabe ,  Keiji Nomaru

发明人： Taiki Sawabe ,  Keiji Nomaru

IPC分类号： G01D15/00

CPC分类号： G01B11/0608 ,  B23K26/048 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which the spot shape of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a first beam splitter by which the laser beam with the spot shape formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed to irradiate the work therewith; a second beam splitter for splitting the reflected light reflected by the work; a first light receiving element for receiving the reflected light transmitted through the second beam splitter; a second light receiving element for receiving the reflected light reflected by the second beam splitter; a light reception region restricting part for restricting the light reception region for the reflected light received by the second light receiving element; and a controller for determining the height position of the upper surface of the work on the basis of the ratio between the quantity of light received by the first light receiving element and the quantity of light received by the second light receiving element.

摘要翻译： 一种高度位置检测器，用于检测夹持在卡盘台上的工件的上表面的高度位置，该环形点形成部分由激光束振荡器振荡的激光束的光点形状形成为环形形状 ; 具有形成为环状的点状激光的第一分束器被引导到第一路径中; 引导到第一路径的激光束被聚光以照射工件的光聚光器; 用于分离由工件反射的反射光的第二分束器; 第一光接收元件，用于接收透射通过第二分束器的反射光; 第二光接收元件，用于接收由第二分束器反射的反射光; 用于限制由第二光接收元件接收的反射光的光接收区域的光接收区域限制部分; 以及控制器，用于根据由第一光接收元件接收的光量与由第二光接收元件接收的光量之比来确定工件的上表面的高度位置。

公开(公告)号：US07499185B2

公开(公告)日：2009-03-03

申请号：US12028470

申请日：2008-02-08

申请人： Keiji Nomaru ,  Taiki Sawabe

发明人： Keiji Nomaru ,  Taiki Sawabe

IPC分类号： G01B11/24 ,  G01B11/14

CPC分类号： G01B11/0608 ,  B23K26/04 ,  B23K26/046 ,  B23K26/0853 ,  G01B2210/50

摘要： A measuring device for measuring the height of a workpiece held on a chuck table provided in a processing machine. The measuring device includes a white light source for emitting white light, an acousto-optic deflecting unit for separating the white light emitted from the white light source to produce a flux of diffracted light and for swinging the flux of the diffracted light over a predetermined angular range by applying a voltage, a pinhole mask for passing light having a part of the wavelengths of the diffracted light produced by the acousto-optic deflecting unit, and a chromatic aberration lens for focusing the light passed through the pinhole mask and for applying the focused light to the workpiece held on the chuck table.

摘要翻译： 一种用于测量保持在设置在加工机器中的卡盘台上的工件的高度的测量装置。 测量装置包括用于发射白光的白光源，声光偏转单元，用于分离从白光源发射的白光，以产生衍射光束，并将衍射光的光束摆动在预定角度 通过施加电压的范围，用于通过具有由声光偏转单元产生的衍射光的一部分波长的光的针孔掩模和用于聚焦通过针孔掩模的光并用于施加聚焦的色差透镜 光照到卡盘上的工件。

公开(公告)号：US07402773B2

公开(公告)日：2008-07-22

申请号：US11437675

申请日：2006-05-22

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/06

CPC分类号： B23K26/0665 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： Disclosed herein is a laser beam processing machine having a chuck table for holding a workpiece, a laser beam applicator for applying a laser beam capable of passing through the workpiece to the workpiece held on the chuck table, and a processing-feeder for moving the chuck table and the laser beam applicator relative to each other, the laser beam applicator having a laser beam oscillator, an optical transmitter for transmitting a laser beam oscillated from the laser beam oscillator and a condenser lens for converging a laser beam transmitted by the optical, transmitter. The optical transmitter includes a birefringence lens for separating the laser beam oscillated from the laser beam oscillator into normal light and abnormal light; and the condenser lens converges respectively the normal light and the abnormal light separated by the birefringence lens to form the focal point of the normal light and the focal point of the abnormal light.

摘要翻译： 本发明公开了一种具有用于保持工件的卡盘台的激光束处理机，用于将能够通过工件的激光束施加到保持在卡盘台上的工件的激光束施加器，以及用于移动卡盘的加工供给器 所述激光束施加器具有激光束振荡器，用于传输从所述激光束振荡器振荡的激光束的光发射器和用于会聚由所述光学发射器发射的激光束的聚光透镜 。 光发射机包括用于将从激光束振荡器振荡的激光束分离成正常光和异常光的双折射透镜; 并且聚光透镜分别收敛由双折射透镜分离的正常光和异常光，以形成正常光的焦点和异常光的焦点。