发明授权
- 专利标题: Electric-magnetic field-generating element and assembling method for same
- 专利标题(中): 电磁场发生元件及其组装方法
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申请号: US11483804申请日: 2006-07-10
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公开(公告)号: US07429740B2公开(公告)日: 2008-09-30
- 发明人: Carlo Salvesen , Ralf Degenhardt
- 申请人: Carlo Salvesen , Ralf Degenhardt
- 申请人地址: DE Heimstetten
- 专利权人: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- 当前专利权人地址: DE Heimstetten
- 代理机构: Patterson & Sheridan, LLP
- 优先权: EP05015009 20050711
- 主分类号: H01J1/50
- IPC分类号: H01J1/50
摘要:
An electric-magnetic field-generating element and a multipole element comprising a plurality of these field-generating elements providing for a stable charged particle beam are described. For some embodiments, the electric-magnetic field-generating element includes a pole piece, a yoke to which the pole piece is attached, at least one coil, a vacuum-tight container accommodating the coil(s), and a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and the yoke.
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