公开(公告)号：US07429740B2

公开(公告)日：2008-09-30

申请号：US11483804

申请日：2006-07-10

申请人： Carlo Salvesen ,  Ralf Degenhardt

发明人： Carlo Salvesen ,  Ralf Degenhardt

IPC分类号： H01J1/50

CPC分类号： H01J37/153 ,  H01J37/1413 ,  H01J37/145 ,  H01J2237/10 ,  H01J2237/1508 ,  Y10T29/4902

摘要： An electric-magnetic field-generating element and a multipole element comprising a plurality of these field-generating elements providing for a stable charged particle beam are described. For some embodiments, the electric-magnetic field-generating element includes a pole piece, a yoke to which the pole piece is attached, at least one coil, a vacuum-tight container accommodating the coil(s), and a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and the yoke.

摘要翻译： 描述了包括提供稳定的带电粒子束的多个这些场产生元件的电磁场产生元件和多极元件。 对于一些实施例，电磁场产生元件包括极片，连接有极片的磁轭，至少一个线圈，容纳线圈的真空密封容器和适于保持 真空密封容器使得真空密封容器与极靴和轭架间隔开。

公开(公告)号：US08203119B2

公开(公告)日：2012-06-19

申请号：US11568442

申请日：2005-06-10

申请人： Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Dirk Hambach ,  Walter Kögler ,  Harry Munack ,  Carlo Salvesen

发明人： Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Dirk Hambach ,  Walter Kögler ,  Harry Munack ,  Carlo Salvesen

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/244 ,  G01R31/305 ,  H01J2237/24485 ,  H01J2237/24585

摘要： The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer. The improvement of the energy resolution is significant, in particular when the beam tube element is part of a high voltage beam tube.

摘要翻译： 本发明提供一种带电粒子束装置，用于沿着光轴传播的初级带电粒子束来检查或构造样本; 具有管电压的束管元件; 以及在束管元件附近的延迟场分析器，以检测由样品上的一次带电粒子束产生的二次带电粒子。 根据本发明，延迟场分析仪由此包括第二电压的入口栅电极; 至少一个第一电压的滤波栅极; 用于检测次级带电粒子的带电粒子检测器; 以及至少一个另外的电极元件，其布置在所述入口栅格电极和所述至少一个滤光栅格电极之间。 至少一个另外的电极元件减小了延迟电场区域中的杂散场区域的尺寸，以提高延迟场分析器的能量分辨率。 能量分辨率的提高是显着的，特别是当束管元件是高压束管的一部分时。

公开(公告)号：US20070023673A1

公开(公告)日：2007-02-01

申请号：US11483804

申请日：2006-07-10

申请人： Carlo Salvesen ,  Ralf Degenhardt

发明人： Carlo Salvesen ,  Ralf Degenhardt

IPC分类号： H01J1/50

CPC分类号： H01J37/153 ,  H01J37/1413 ,  H01J37/145 ,  H01J2237/10 ,  H01J2237/1508 ,  Y10T29/4902

摘要： An electric-magnetic field-generating element and a multipole element comprising a plurality of these field-generating elements providing for a stable charged particle beam are described. For some embodiments, the electric-magnetic field-generating element includes a pole piece, a yoke to which the pole piece is attached, at least one coil, a vacuum-tight container accommodating the coil(s), and a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and the yoke.

摘要翻译： 描述了包括提供稳定的带电粒子束的多个这些场产生元件的电磁场产生元件和多极元件。 对于一些实施例，电磁场产生元件包括极片，连接有极片的磁轭，至少一个线圈，容纳线圈的真空密封容器和适于保持 真空密封容器使得真空密封容器与极靴和轭架间隔开。

公开(公告)号：US20090200463A1

公开(公告)日：2009-08-13

申请号：US11568442

申请日：2005-06-10

申请人： Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Dirk Hambach ,  Walter Kögler ,  Harry Munack ,  Carlo Salvesen

发明人： Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Dirk Hambach ,  Walter Kögler ,  Harry Munack ,  Carlo Salvesen

IPC分类号： G01N23/00 ,  H01J47/00

CPC分类号： H01J37/244 ,  G01R31/305 ,  H01J2237/24485 ,  H01J2237/24585

摘要： The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer. The improvement of the energy resolution is significant, in particular when the beam tube element is part of a high voltage beam tube.

摘要翻译： 本发明提供一种带电粒子束装置，用于沿着光轴传播的初级带电粒子束来检查或构造样本; 具有管电压的束管元件; 以及在束管元件附近的延迟场分析器，以检测由样品上的一次带电粒子束产生的二次带电粒子。 根据本发明，延迟场分析仪由此包括第二电压的入口栅电极; 至少一个第一电压的滤波栅极; 用于检测次级带电粒子的带电粒子检测器; 以及至少一个另外的电极元件，其布置在所述入口栅格电极和所述至少一个滤光栅格电极之间。 至少一个另外的电极元件减小了延迟电场区域中的杂散场区域的尺寸，以提高延迟场分析器的能量分辨率。 能量分辨率的提高是显着的，特别是当束管元件是高压束管的一部分时。

公开(公告)号：US07928405B2

公开(公告)日：2011-04-19

申请号：US12181199

申请日：2008-07-28

申请人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

发明人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC分类号： H01J1/50

CPC分类号： H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

摘要： A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

摘要翻译： 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US07872239B2

公开(公告)日：2011-01-18

申请号：US12181171

申请日：2008-07-28

申请人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

发明人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01R31/305

CPC分类号： H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

摘要翻译： 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。