发明授权
- 专利标题： Method and apparatus for pressure and mix ratio control
- 专利标题（中）： 压力和混合比控制的方法和装置
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申请号： US11684888申请日： 2007-03-12
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公开(公告)号： US07437944B2公开(公告)日： 2008-10-21
- 发明人: Chris Melcer , John Lane
- 申请人： Chris Melcer , John Lane
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan
- 主分类号： G01F1/00
- IPC分类号： G01F1/00
摘要：
The present invention provides apparatus and method for controlling mix ratio of gas supplied to a processing chamber integrated with chamber pressure. In one embodiment, an integrated controller is used to adjust mix ratio and chamber pressure. In one embodiment, the mix ratio and chamber pressure may be adjusted using a flow sensor and a control valve disposed in each gas supply line. In one embodiment, the flow sensor used in each gas supply line is insensitive to upstream pressure perturbations.
公开/授权文献
- US20070204702A1 METHOD AND APPARATUS FOR PRESSURE AND MIX RATIO CONTROL 公开/授权日：2007-09-06
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