Invention Grant
- Patent Title: Method for fabricating a buried metallic layer in a semiconductor body and semiconductor component having a buried metallic layer
- Patent Title (中): 在半导体本体中制造掩埋金属层的方法和具有掩埋金属层的半导体部件
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Application No.: US11153239Application Date: 2005-06-15
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Publication No.: US07439198B2Publication Date: 2008-10-21
- Inventor: Hans-Joachim Schulze , Helmut Strack
- Applicant: Hans-Joachim Schulze , Helmut Strack
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Agency: Maginot, Moore & Beck
- Priority: DE102004028933 20040615
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a buried metallic layer at a predetermined vertical position in a semiconductor body having a first and second side includes a step of applying a metal layer to one of the first and second sides at least in sections. The method also includes establishing a positive temperature gradient in a vertical direction of the semiconductor body proceeding from the one side. The temperature in the region of the one side is higher than the eutectic temperatures of system, so that the metal of the metal layer migrates in the vertical direction into the semiconductor body. The method also includes discontinuing the temperature gradient once the metal reaches the predetermined vertical position in the semiconductor body, in order thereby to obtain the metallic layer at the predetermined position.
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