Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US11677956Application Date: 2007-02-22
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Publication No.: US07439587B2Publication Date: 2008-10-21
- Inventor: Yuuichi Hirano , Shigeto Maegawa , Toshiaki Iwamatsu , Takuji Matsumoto , Shigenobu Maeda , Yasuo Yamaguchi
- Applicant: Yuuichi Hirano , Shigeto Maegawa , Toshiaki Iwamatsu , Takuji Matsumoto , Shigenobu Maeda , Yasuo Yamaguchi
- Applicant Address: JP Tokyo
- Assignee: Renesas Technology Corp.
- Current Assignee: Renesas Technology Corp.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2000-080096 20000322; JP2000-342937 20001110
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L27/12 ; H01L31/0392

Abstract:
An isolation insulating film (5) of partial-trench type is selectively formed in an upper surface of a silicon layer (4). A power supply line (21) is formed above the isolation insulating film (5). Below the power supply line (21), a complete isolation portion (23) reaching an upper surface of an insulating film (3) is formed in the isolation insulating film (5). In other words, a semiconductor device comprises a complete-isolation insulating film which is so formed as to extend from the upper surface of the silicon layer (4) and reach the upper surface of insulating film (3) below the power supply line (21). With this structure, it is possible to obtain the semiconductor device capable of suppressing variation in potential of a body region caused by variation in potential of the power supply line.
Public/Granted literature
- US20070138560A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2007-06-21
Information query
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