发明授权
- 专利标题: Semiconductor device and method of manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11677956申请日: 2007-02-22
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公开(公告)号: US07439587B2公开(公告)日: 2008-10-21
- 发明人: Yuuichi Hirano , Shigeto Maegawa , Toshiaki Iwamatsu , Takuji Matsumoto , Shigenobu Maeda , Yasuo Yamaguchi
- 申请人: Yuuichi Hirano , Shigeto Maegawa , Toshiaki Iwamatsu , Takuji Matsumoto , Shigenobu Maeda , Yasuo Yamaguchi
- 申请人地址: JP Tokyo
- 专利权人: Renesas Technology Corp.
- 当前专利权人: Renesas Technology Corp.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2000-080096 20000322; JP2000-342937 20001110
- 主分类号: H01L27/01
- IPC分类号: H01L27/01 ; H01L27/12 ; H01L31/0392
摘要:
An isolation insulating film (5) of partial-trench type is selectively formed in an upper surface of a silicon layer (4). A power supply line (21) is formed above the isolation insulating film (5). Below the power supply line (21), a complete isolation portion (23) reaching an upper surface of an insulating film (3) is formed in the isolation insulating film (5). In other words, a semiconductor device comprises a complete-isolation insulating film which is so formed as to extend from the upper surface of the silicon layer (4) and reach the upper surface of insulating film (3) below the power supply line (21). With this structure, it is possible to obtain the semiconductor device capable of suppressing variation in potential of a body region caused by variation in potential of the power supply line.
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