Invention Grant
- Patent Title: Beta control using a rapid thermal oxidation
- Patent Title (中): Beta控制使用快速热氧化
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Application No.: US11246298Application Date: 2005-10-11
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Publication No.: US07439607B2Publication Date: 2008-10-21
- Inventor: Arne W. Ballantine , Douglas D. Coolbaugh , Steve S. Williams
- Applicant: Arne W. Ballantine , Douglas D. Coolbaugh , Steve S. Williams
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Connolly Bove Lodge & Hutz LLP
- Agent William D. Sabo
- Main IPC: H01L27/082
- IPC: H01L27/082
Abstract:
A method of forming semiconductor device treating a surface of a substrate to produce a discontinuous growth of a material on the surface through rapid thermal oxidation of the substrate surface at a temperature of less than about 700° C.
Public/Granted literature
- US20060030099A1 Beta control using a rapid thermal oxidation Public/Granted day:2006-02-09
Information query
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