发明授权
- 专利标题: Method for producing silicon single crystals and silicon single crystal produced thereby
- 专利标题(中): 由此制造单晶硅和单晶硅的方法
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申请号: US11406272申请日: 2006-04-19
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公开(公告)号: US07442251B2公开(公告)日: 2008-10-28
- 发明人: Shuichi Inami , Hiroki Murakami , Nobumitsu Takase , Ken Hamada , Tsuyoshi Nakamura
- 申请人: Shuichi Inami , Hiroki Murakami , Nobumitsu Takase , Ken Hamada , Tsuyoshi Nakamura
- 申请人地址: JP Tokyo
- 专利权人: Sumco Corporation
- 当前专利权人: Sumco Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Pillsbury Winthrop Shaw Pittman, LLP
- 优先权: JP2005-179996 20050620
- 主分类号: C30B15/20
- IPC分类号: C30B15/20
摘要:
This method for producing silicon single crystals includes: growing a silicon single crystal by the Czochralski method while cooling at least part of the silicon single crystal under growth with a cooling member which circumferentially surrounds the silicon single crystal and has an inner contour that is coaxial with a pull axis, wherein an ambient gas in which the silicon single crystal is grown includes a hydrogen-atom-containing substance in gaseous form. This silicon single crystal is produced by the above method.
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