发明授权
US07442570B2 Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom 有权
在晶片封装环境中制造AL / GE键合的方法和由其制造的产品

Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
摘要:
A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.
信息查询
0/0