公开(公告)号：US07442570B2

公开(公告)日：2008-10-28

申请号：US11084296

申请日：2005-03-18

申请人： Steven S. Nasiri ,  Anthony Francis Flannery, Jr.

发明人： Steven S. Nasiri ,  Anthony Francis Flannery, Jr.

IPC分类号： H01L21/00

CPC分类号： B81C1/00238 ,  B23K20/023 ,  B81B3/0018 ,  B81B7/007 ,  B81B2203/0315 ,  B81B2207/012 ,  B81B2207/094 ,  B81C1/00269 ,  B81C3/001 ,  B81C2203/0118 ,  B81C2203/035 ,  B81C2203/038 ,  B81C2203/0792 ,  H01L21/187

摘要： A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.

摘要翻译： 公开了一种在两个基板之间将锗键合到铝以产生牢固的电气和机械接触的方法。 铝 - 锗键具有以下独特的属性组合：（1）可形成气密封; （2）可用于在两个基板之间形成导电路径; （3）可以对其进行图案化，使得该导电路径被定位; （4）可以用作为标准铸造CMOS工艺的铝制成。 这具有允许晶片级接合或封装而不向CMOS晶片添加任何附加工艺层的显着优点。

公开(公告)号：US09148729B2

公开(公告)日：2015-09-29

申请号：US13626532

申请日：2012-09-25

申请人： Invensense, Inc.

发明人： Olafur Mar Josefsson

IPC分类号： H04R3/00 ,  H04R19/00 ,  H04R3/06 ,  H04R19/01

CPC分类号： H04R3/06 ,  H04R3/00 ,  H04R19/005 ,  H04R19/016 ,  H04R19/04 ,  H04R2201/003

摘要： Methods and apparatus automatically cancel or attenuate an unwanted signal (such as low frequencies from wind buffets) from, and/or control frequency response of, a condenser microphone, or control the effective condenser microphone sensitivity before the signal reaches an ASIC or other processing circuit. As a result, the maximum amplitude signal seen by the processing circuit is limited, thereby preventing overloading the input of the processing circuit. Remaining (wanted) frequencies can be appropriately amplified to reduce the noise burden on further processing circuits. A corrective signal is applied to a bias terminal of the condenser microphone to cancel the unwanted signal. Optionally or alternatively, a controllable impedance is connected to a line that carries the signal generated by the MEMS microphone, so as to attenuate unwanted portions of the signal.

摘要翻译： 方法和装置自动地消除或衰减电容式麦克风的不需要的信号（例如来自风自助餐的低频）和/或控制频率响应，或者在信号到达ASIC或其他处理电路之前控制有效的电容式麦克风灵敏度 。 结果，处理电路看到的最大振幅信号受到限制，从而防止处理电路的输入过载。 可以适当放大剩余（有用）频率，以减少进一步处理电路的噪声负担。 校正信号被施加到电容麦克风的偏置端子以消除不想要的信号。 可选地或替代地，可控阻抗连接到承载由MEMS麦克风产生的信号的线，以便衰减信号的不期望的部分。