发明授权
US07442570B2 Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
有权
在晶片封装环境中制造AL / GE键合的方法和由其制造的产品
- 专利标题: Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
- 专利标题(中): 在晶片封装环境中制造AL / GE键合的方法和由其制造的产品
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申请号: US11084296申请日: 2005-03-18
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公开(公告)号: US07442570B2公开(公告)日: 2008-10-28
- 发明人: Steven S. Nasiri , Anthony Francis Flannery, Jr.
- 申请人: Steven S. Nasiri , Anthony Francis Flannery, Jr.
- 申请人地址: US CA Santa Clara
- 专利权人: Invensence Inc.
- 当前专利权人: Invensence Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Sawyer Law Group LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.
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