发明授权
US07442828B2 Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use 失效
含氟链烷醇的烯烃单体的前体,以及相关的合成和使用方法

Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
摘要:
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
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