发明授权
US07442828B2 Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
失效
含氟链烷醇的烯烃单体的前体,以及相关的合成和使用方法
- 专利标题: Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
- 专利标题(中): 含氟链烷醇的烯烃单体的前体,以及相关的合成和使用方法
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申请号: US11844806申请日: 2007-08-24
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公开(公告)号: US07442828B2公开(公告)日: 2008-10-28
- 发明人: Gregory Breyta , Richard Anthony DiPietro , Daniel Joseph Dawson
- 申请人: Gregory Breyta , Richard Anthony DiPietro , Daniel Joseph Dawson
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Mintz, Levin, Cohn, Ferris, Glovsky, and Popeo PC
- 代理商 Isaac M. Rutenberg
- 主分类号: C07C69/013
- IPC分类号: C07C69/013 ; C07C35/14
摘要:
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
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