Invention Grant
- Patent Title: Transfer characteristic calculation apparatus, transfer characteristic calculation method, and exposure apparatus
- Patent Title (中): 传输特性计算装置,传送特性计算方法和曝光装置
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Application No.: US11688408Application Date: 2007-03-20
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Publication No.: US07443493B2Publication Date: 2008-10-28
- Inventor: Satoru Oishi , Hideki Ina
- Applicant: Satoru Oishi , Hideki Ina
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-095854 20060330
- Main IPC: G01B9/00
- IPC: G01B9/00

Abstract:
A transfer characteristic calculation apparatus for calculating a transfer characteristic of an imaging optical system includes a light source, a generation unit which generates a second signal by converting a first signal obtained by stretching an impulse signal on a space axis into a positive value using a light from the light source, a sensor which obtains an image that is output from the imaging optical system as an output signal when a light intensity distribution is inputted as the second signal, and a calculation unit which calculates the transfer characteristic of the imaging optical system by convolution of a third signal with the forth signal that is obtained by canceling a bias component of the output signal obtained by the sensor, the third being an impulse signal upon convolution with the first signal.
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