发明授权
- 专利标题： Method and system for resonant operation of a reflective spatial light modulator
- 专利标题（中）： 反射空间光调制器的谐振操作方法和系统
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申请号： US11429376申请日： 2006-05-04
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公开(公告)号： US07443568B2公开(公告)日： 2008-10-28
- 发明人: Dongmin Chen , Tore Nauta
- 申请人： Dongmin Chen , Tore Nauta
- 申请人地址： US CA Sunnyvale
- 专利权人： Miradia Inc.
- 当前专利权人： Miradia Inc.
- 当前专利权人地址： US CA Sunnyvale
- 代理机构： Townsend and Townsend and Crew LLP
- 主分类号： G02B26/00
- IPC分类号： G02B26/00 ; G02B26/08
摘要：
A method of activating a micro-mirror includes applying a first electrode voltage to one or more electrodes associated with the micro-mirror. The micro-mirror is positioned at a first positive deflection angle during a portion of the application of the first electrode voltage. The method also includes maintaining the first electrode voltage for a first predetermined time and applying a second electrode voltage to the one or more electrodes. The micro-mirror rotates to a first negative deflection angle during a portion of the application of the second electrode voltage. The method further includes maintaining the second electrode voltage for a second predetermined time and applying a third electrode voltage to the one or more electrodes. The micro-mirror is positioned at a second positive deflection angle greater than the first positive deflection angle during a portion of the application of the third electrode voltage.