发明授权
- 专利标题: Wafer level chip scale package and manufacturing method for the same
- 专利标题(中): 晶圆级芯片级封装及制造方法相同
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申请号: US11115579申请日: 2005-04-26
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公开(公告)号: US07446422B1公开(公告)日: 2008-11-04
- 发明人: Jong Sik Paek , Sung Su Park , Seong Min Seo
- 申请人: Jong Sik Paek , Sung Su Park , Seong Min Seo
- 申请人地址: US AZ Chandler
- 专利权人: Amkor Technology, Inc.
- 当前专利权人: Amkor Technology, Inc.
- 当前专利权人地址: US AZ Chandler
- 代理机构: Gunnison, McKay & Hodgson, L.L.P.
- 代理商 Serge J. Hodgson
- 主分类号: H01L29/40
- IPC分类号: H01L29/40
摘要:
Disclosed are a wafer level chip scale package and a method for manufacturing the same. An RDL is formed on a semiconductor die through a sputtering process, and a UBM is formed on the RDL through an electroplating process by using the RDL as a seed layer. Thus, the RDL sputtering, UBM electroplating, RDL etching and leakage descum processes are carried out only one time, thereby simplifying the structure and manufacturing processes of the package. Since a copper layer of the RDL is formed with a relatively large thickness through the sputtering process, current density is uniformly distributed during the electroplating process, so it is possible to uniformly form the thickness of the UBM by using pure nickel.
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