Invention Grant
- Patent Title: Calibration standard
- Patent Title (中): 校准标准
-
Application No.: US11454486Application Date: 2006-06-16
-
Publication No.: US07448250B2Publication Date: 2008-11-11
- Inventor: Helmut Fischer
- Applicant: Helmut Fischer
- Applicant Address: DE Sindelfingen
- Assignee: Immobiliengesellschaft Helmut Fischer GmbH & Co. KG
- Current Assignee: Immobiliengesellschaft Helmut Fischer GmbH & Co. KG
- Current Assignee Address: DE Sindelfingen
- Agency: Kriegsman & Kriegsman
- Priority: DE102005028652 20050620
- Main IPC: G01B21/08
- IPC: G01B21/08 ; G01B7/06

Abstract:
The invention relates to a calibration standard, especially for the calibration of devices for the non-destructive measurement of the thickness of thin layers, with a carrier layer (12) consisting of a basic material and a standard (17) applied on the carrier layer (12), said standard having the thickness of the layer to be measured at which the device is to be calibrated, with the carrier layer (12) comprising a plane-parallel measuring surface (16) to its bearing surface (14), that the standard (17) comprises a bearing surface (18) plane-parallel with its measuring surface (19) for bearing on the measuring surface (16) of the carrier layer (12), and that the standard (17) is permanently provided on the carrier layer (12) by means of plating by rubbing.
Public/Granted literature
- US20060284089A1 Calibration standard Public/Granted day:2006-12-21
Information query