发明授权
- 专利标题: Phase-change memory device
- 专利标题(中): 相变存储器件
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申请号: US11754437申请日: 2007-05-29
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公开(公告)号: US07453111B2公开(公告)日: 2008-11-18
- 发明人: Kyung-Chang Ryoo , Ju-Chul Park , Se-Ahn Song , Yoon-Jong Song
- 申请人: Kyung-Chang Ryoo , Ju-Chul Park , Se-Ahn Song , Yoon-Jong Song
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2006-0047643 20060526
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
Disclosed is a phase-change memory device including a phase-change material pattern, a diffusion barrier layer, a bottom electrode and a top electrode. The phase-change material pattern is placed on the bottom electrode, and the diffusion barrier layer containing tellurium is placed on the phase-change material pattern. The top electrode containing titanium is placed on the diffusion barrier layer. The diffusion barrier layer acts to inhibit diffusion of titanium from the top electrode into the phase-change material pattern.
公开/授权文献
- US20070284622A1 PHASE-CHANGE MEMORY DEVICE 公开/授权日:2007-12-13
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