Invention Grant
- Patent Title: Simplified wafer alignment
- Patent Title (中): 简化晶片对准
-
Application No.: US10830734Application Date: 2004-04-23
-
Publication No.: US07453160B2Publication Date: 2008-11-18
- Inventor: Andrew M. Ray
- Applicant: Andrew M. Ray
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L23/544
- IPC: H01L23/544

Abstract:
The present invention is directed to aligning wafers within semiconductor fabrication tools. More particularly, one or more aspects of the present invention pertain to quickly and efficiently finding an alignment marking, such as an alignment notch, on a wafer to allow the wafer to be appropriately oriented within an alignment tool. Unlike conventional systems, the notch is located without firmly holding and spinning or rotating the wafer. Exposure to considerable backside contaminants is thereby mitigated and the complexity and/or cost associated with aligning the wafer is thereby reduced.
Public/Granted literature
- US20050251279A1 Simplified wafer alignment Public/Granted day:2005-11-10
Information query
IPC分类: