发明授权
- 专利标题: Carbon nanotube-based electronic switch
- 专利标题(中): 基于碳纳米管的电子开关
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申请号: US11084287申请日: 2005-03-18
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公开(公告)号: US07456482B2公开(公告)日: 2008-11-25
- 发明人: Heinz H. Busta , Ian W. Wylie , Gary W. Snider
- 申请人: Heinz H. Busta , Ian W. Wylie , Gary W. Snider
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 代理商 Thomas E. Omholt; Phillip M. Pippenger; Steven D. Weseman
- 主分类号: H01H59/00
- IPC分类号: H01H59/00
摘要:
An improved microelectromechanical switch assembly comprises a linearly movable switch rod constrained via a switch bearing, the switch rod being actuated by electrostatic deflection. Movement of the switch rod to one end of its travel puts the switch assembly in a closed state while movement of the switch rod to the other end of its travel puts the switch assembly in an open state. In an embodiment of the invention, one or both of the switch rod and the switch bearing are fabricated of a carbon nanotube. The improved microelectromechanical switch assembly provides low insertion loss and long lifetime in an embodiment of the invention.
公开/授权文献
- US20060273871A1 Carbon nanotube-based electronic switch 公开/授权日:2006-12-07
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