发明授权
- 专利标题： Resonator and filter using the same
- 专利标题（中）： 谐振器和滤波器使用相同
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申请号： US11194460申请日： 2005-08-02
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公开(公告)号： US07456707B2公开(公告)日： 2008-11-25
- 发明人: Naohiro Tsurumi , Kazuhiro Yahata , Yasuhiro Uemoto , Tsuyoshi Tanaka , Daisuke Ueda , Atsuhiko Kanda
- 申请人： Naohiro Tsurumi , Kazuhiro Yahata , Yasuhiro Uemoto , Tsuyoshi Tanaka , Daisuke Ueda , Atsuhiko Kanda
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2004-238398 20040818
- 主分类号： H03H9/54
- IPC分类号： H03H9/54
摘要：
An acoustic resonator includes: a substrate; a resonator film which is supported above the main surface of the substrate and includes a piezoelectric film and a pair of a top electrode and a bottom electrode which are formed on part of the top surface and part of the bottom surface of the piezoelectric film, respectively, to face each other via the piezoelectric film; and a support which is formed on the main surface of the substrate to support the resonator film from below. A resonance cavity is provided in part of a region between the substrate and the resonator film below at least a portion of part of the resonator film where the top electrode and the bottom electrode coincide with each other and an isolation cavity is provided in other part of said region where the support and the resonance cavity do not exist.
公开/授权文献
- US20060038636A1 Resonator and filter using the same 公开/授权日：2006-02-23
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