发明授权
US07460003B2 Electronic fuse with conformal fuse element formed over a freestanding dielectric spacer 失效
具有保形熔丝元件的电子保险丝,形成在独立电介质垫片上

Electronic fuse with conformal fuse element formed over a freestanding dielectric spacer
摘要:
An electronic fuse for an integrated circuit and a method of fabrication thereof are presented. The electronic fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The fuse element has a convex upper surface and a lower surface with a radius of curvature at a smallest surface area of curvature less than or equal to 100 nanometers. Fabricating the electronic fuse includes forming an at least partially freestanding dielectric spacer above a supporting structure, and then conformably forming the fuse element of the fuse over at least a portion of the freestanding dielectric spacer, with the fuse element characterized as noted above. The dielectric spacer may remain in place as a thermally insulating layer underneath the fuse element, or may be removed to form a void underneath the fuse element.
信息查询
0/0