发明授权
US07460003B2 Electronic fuse with conformal fuse element formed over a freestanding dielectric spacer
失效
具有保形熔丝元件的电子保险丝,形成在独立电介质垫片上
- 专利标题: Electronic fuse with conformal fuse element formed over a freestanding dielectric spacer
- 专利标题(中): 具有保形熔丝元件的电子保险丝,形成在独立电介质垫片上
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申请号: US11372387申请日: 2006-03-09
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公开(公告)号: US07460003B2公开(公告)日: 2008-12-02
- 发明人: Louis Lu-Chen Hsu , Jack A. Mandelman , William R. Tonti , Chih-Chao Yang
- 申请人: Louis Lu-Chen Hsu , Jack A. Mandelman , William R. Tonti , Chih-Chao Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Heslin Rothenberg Farley & Mesiti PC
- 主分类号: H01H85/08
- IPC分类号: H01H85/08 ; H01L23/62
摘要:
An electronic fuse for an integrated circuit and a method of fabrication thereof are presented. The electronic fuse has a first terminal portion and a second terminal portion interconnected by a fuse element. The fuse element has a convex upper surface and a lower surface with a radius of curvature at a smallest surface area of curvature less than or equal to 100 nanometers. Fabricating the electronic fuse includes forming an at least partially freestanding dielectric spacer above a supporting structure, and then conformably forming the fuse element of the fuse over at least a portion of the freestanding dielectric spacer, with the fuse element characterized as noted above. The dielectric spacer may remain in place as a thermally insulating layer underneath the fuse element, or may be removed to form a void underneath the fuse element.
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